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Joerg Schultz

Carl Zeiss AG

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Publication

Featured researches published by Joerg Schultz.

Archive | 2005

Optical beam transformation system and illumination system comprising an optical beam transformation system

Joerg Schultz; Markus Deguenther; Markus Brotsack; Gerhard Fuerter; Wolfgang Singer; Manfred Maul; Alexander Kohl; Damian Fiolka

Archive | 2000

Multi mirror system for an illumination system

Martin Antoni; Isabel Escudero-Sanz; Wolfgang Singer; Johannes Wangler; Joerg Schultz

Archive | 1999

Illumination system,particularly for deep ultraviolet lithography

Joerg Schultz; Johannes Wangler; Karl-Heinz Schuster; Udo Dinger

Archive | 1999

EUV illumination system especially for microlithography in the production of electronic components with sub-micron structure widths

Joerg Schultz; Johannes Wangler; Karl-Heinz Schuster; Udo Dinger

Archive | 1997

Reticular objective for microlithography-projection exposure installations

Joerg Schultz; Johannes Wangler; Karl-Heinz Schuster

Archive | 1999

Lighting system, especially for extreme ultraviolet lithography

Joerg Schultz; Johannes Wangler

Archive | 1999

Beleuchtungssystem insbesondere für die euv-lithographie

Joerg Schultz; Johannes Wangler

Archive | 2004

Lithography Lens System And Projection Exposure System Provided With At Least One Lithography Lens System Of This Type

Hans-Juergen Rostalski; Alexander Epple; Aurelian Dodoc; Johannes Wangler; Karl-Heinz Schuster; Joerg Schultz; Franz-Josef Stickel; Wolfgang Singer; Joachim Wietzorrek

Archive | 2004

Catadioptric reduction lens comprising a polarisation beam splitter

Aurelian Dodoc; Toralf Gruner; Joerg Schultz; Wilhelm Ulrich

Archive | 2000

Control of illumination distribution in the exit pupil of an EUV illumination system

Joerg Schultz

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Collaboration

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Johannes Wangler

Carl Zeiss AG

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Karl-Heinz Schuster

Carl Zeiss AG

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Wolfgang Singer

Carl Zeiss AG

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Aurelian Dodoc

Carl Zeiss AG

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Isabel Escudero-Sanz

Carl Zeiss AG

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Martin Antoni

Carl Zeiss AG

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Udo Dinger

Carl Zeiss AG

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Alexander Epple

Carl Zeiss AG

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Alexander Kohl

Carl Zeiss AG

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Damian Fiolka

Carl Zeiss AG

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