Alexander Kohl | Researchain

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Featured researches published by Alexander Kohl.

Archive | 2005

Optical beam transformation system and illumination system comprising an optical beam transformation system

Joerg Schultz; Markus Deguenther; Markus Brotsack; Gerhard Fuerter; Wolfgang Singer; Manfred Maul; Alexander Kohl; Damian Fiolka

Archive | 2005

Projection lens and microlithographic projection exposure apparatus

Martin Brunotte; Jürgen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2002

Microlithographic projection illumination system

Martin Brunotte; Juergen Hartmaier; Hubert Holderer; Winfried Kaiser; Alexander Kohl; Jens Kugler; Manfred Maul; Christian Wagner

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2001

Mounting apparatus for an optical element

Jochen Becker; Bernhard Gellrich; Werner Lang; Alexander Kohl; Sascha Kraus

Archive | 2004

Adjustment Arrangement of an Optical Element

Klaus Beck; Bernhard Gellrich; Hubert Holderer; Thomas Petasch; Cornelia Roesch; Alexander Kohl

Archive | 2011

Microlithographic projection exposure apparatus illumination optics

Alexander Kohl

Archive | 2002

Vorrichtung zur Justage eines optischen Elements

Klaus Beck; Bernhard Gellrich; Hubert Holderer; Thomas Petasch; Cornelia Roesch; Alexander Kohl

Archive | 2000

Device for supporting optical element, has approximately T-shaped joints with connection points between holders at outer ends of T-bearer and manipulators engaging T-support

Jochen Becker; Bernhard Gellrich; Werner Lang; Alexander Kohl; Sascha Kraus

Archive | 2007

Imaging device in a projection exposure machine

Wolfgang Hummel; Jürgen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schöngart; Markus Neumaier; Bärbel Trossbach; Ulrich Weber; Michael Mühlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

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