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Johann Bartha

IBM

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Publication

Featured researches published by Johann Bartha.

Archive | 1988

PECVD (plasma enhanced chemical vapor deposition) method for depositing of tungsten or layers containing tungsten by in situ formation of tungsten fluorides

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Gerhard Schmid

Archive | 1990

METHOD OF PRODUCING MICROMECHANICAL SENSORS FOR THE AFM/STM PROFILOMETRY

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Helga Weiss; Olaf Wolter

Archive | 1997

Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it

Johann Bartha; Thomas Bayer; Johann Greschner; Martin Nonnenmacher; Helga Weiss

Archive | 1993

Method for producing a multi-step structure in a substrate

Johann Bartha; Johann Greschner; Karl Heinz Probst; Gerhard Schmid

Archive | 1988

Process for fabricating arbitrarily shaped through holes in a component

Jürgen Wittlinger; Johann Greschner; Thomas Bayer; Johann Bartha

Archive | 1997

Ion generator for ionographic print heads

Johann Bartha; Frank Druschke; Gerhard Elsner; Johann Greschner

Archive | 1990

Process for fabricating silicon carbide films with a predetermined stress

Johann Bartha; Thomas Bayer; Johann Greschner; Georg Kraus; Olaf Wolter

Archive | 1992

Apparatus for plasma or reactive ion etching and method of etching substrates having a low thermal conductivity

Johann Bartha; Thomas Bayer; Johann Greschner; D. P. Kern; Volker Mattern; Roland Stoehr

Archive | 1991

Method of etching substrates having a low thermal conductivity

Johann Bartha; Thomas Bayer; Johann Greschner; D. P. Kern; Volker Mattern; Roland Stoehr

Archive | 1999

Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range

Johann Bartha; Thomas Bayer; Johann Greschner; Martin Nonnenmacher; Helga Weiss

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Johann Greschner

IBM

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Thomas Bayer

Bayer

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Georg Kraus

IBM

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Gerhard Schmid

IBM

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Helga Weiss

IBM

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Olaf Wolter

IBM

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D. P. Kern

IBM

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Karl-Heinz Probst

IBM

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Martin Nonnenmacher

IBM

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Roland Stoehr

IBM

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