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Johann Dr. Bartha

IBM

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Publication

Featured researches published by Johann Dr. Bartha.

Archive | 1995

Method for producing deep vertical structures in silicon substrates

Johann Dr. Bartha; Johann Greschner; Robert Dr. Junginger; Georg Kraus

Archive | 1995

Field emission device and method for fabricating it

Johann Dr. Bartha; Johann Greschner; Volkhard Wolf

Archive | 1987

Method for producing micromechanical components of any form from plane parallel polymer plates or via holes therein

Johann Dr. Bartha; Thomas Bayer; Johann Greschner; Jürgen Wittlinger

Archive | 1996

Structure and method for fabricating of a field emission device

Johann Dr. Bartha; Gerhard Elsner; Johann Greschner; Samuel Kalt; Klaus Meissner; Rudolf Paul; Roland Schleicher

Archive | 1988

Device for plasma or reactive ion etching, and process for etching thermally poorly conducting substrates

Thomas Bayer; Johann Dr. Bartha; Johann Greschner; D. P. Kern; Volker Mattern; Roland R. Stöhr

Archive | 1992

Process for producing multistep structure in a substrate

Johann Dr. Bartha; Johann Greschner; Karl-Heinz Probst; Gerhard Schmid

Archive | 1995

Verfahren zur Erzeugung von tiefen und vertikalen Strukturen in Silizium-Substraten

Johann Dr. Bartha; Johann Greschner; Robert Dr. Junginger; Georg Kraus

Archive | 1992

Verfahren zum Erzeugen einer mehrstufigen Struktur in einem Substrat

Johann Dr. Bartha; Johann Greschner; Karl-Heinz Probst; Gerhard Schmid

Archive | 1989

Verfahren fuer die herstellung mikromechanischer messfuehler fuer afm/stm-profilometrie und mikromechanischer messfuehlerkopf. Method for the manufacture of micromechanical illegal probe for afm / stm profilometry and micromechanical probe head.

Johann Greschner; Thomas Bayer; Georg Kraus; Olaf Wolter; Helga Weiss; Johann Dr. Bartha

Archive | 1988

A device for plasma or reactive ion etching and method of poorly heat-conductive substrates.

Thomas Bayer; Johann Dr. Bartha; Johann Greschner; D. P. Kern; Volker Mattern; Roland Stoehr

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Johann Greschner

IBM

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Thomas Bayer

Bayer

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D. P. Kern

IBM

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Volker Mattern

IBM

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Georg Kraus

IBM

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Thomas Bayer

Bayer

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Gerhard Schmid

IBM

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Jürgen Wittlinger

IBM

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Karl-Heinz Probst

IBM

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Robert Dr. Junginger

IBM

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