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Timo Laufer

Carl Zeiss AG

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Publication

Featured researches published by Timo Laufer.

Archive | 2013

EUV Exposure Apparatus

Norman Baer; Ulrich Loering; Oliver Natt; Gero Wittich; Timo Laufer; Peter Kuerz; Guido Limbach; Stefan Hembacher; Holger Walter; Yim-Bun-Patrick Kwan; Markus Hauf; Franz-Josef Stickel; Jan Van Schoot

Archive | 2005

Optical component that includes a material having a thermal longitudinal expansion with a zero crossing

Timo Laufer; Jean-Noel Fehr; Harald Kirchner; Andreas Ochse

Archive | 2003

Euv projection lens with mirrors made from materials with differing signs for the rise in temperature dependence of the thermal expansion coefficient around the zero transition temperature

Udo Dinger; Frank Eisert; Stefan Koehler; Andreas Ochse; Johannes Zellner; Martin Lowisch; Timo Laufer

Archive | 2004

Projektionsobjektiv, mikrolithographische Projektionsbelichtungsanlage und Verfahren zur Herstellung einer Halbleiterschaltung

Jean-Noel Fehr; Timo Laufer

Archive | 2004

Optical component, comprising a material with a predetermined homogeneity of thermal expansion

Timo Laufer; Johannes Zellner

Archive | 2011

TEMPERATURE-CONTROL DEVICE FOR AN OPTICAL ASSEMBLY

Armin Schoeppach; Timo Laufer

Archive | 2003

Optical component comprising a material having zero longitudinal thermal expansion

Timo Laufer; Jean-Noel Fehr; Harald Kirchner

Archive | 2004

Projection lens, microlithographic projection exposure system and method for producing a semiconductor circuit

Jean-Noel Fehr; Timo Laufer

Archive | 2015

OPTICAL ARRANGEMENT IN AN OPTICAL SYSTEM, IN PARTICULAR IN A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS

Timo Laufer; Alexander Sauerhoefer

Archive | 2011

Protection module for euv lithography apparatus, and euv lithography apparatus

Dirk Heinrich Ehm; Timo Laufer; Ben Banney; Jens Kugler; Ulrich Nieken; Franz Keller

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Jean-Noel Fehr

Carl Zeiss AG

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Alireza Akbarinia

Carl Zeiss AG

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Jens Kugler

Carl Zeiss AG

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Armin Schoeppach

Carl Zeiss AG

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Ben Banney

Carl Zeiss AG

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Dirk Heinrich Ehm

Carl Zeiss AG

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Franz Keller

University of Stuttgart

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Johannes Zellner

Carl Zeiss AG

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Alexander Sauerhoefer

Carl Zeiss AG

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Andreas Ochse

Carl Zeiss AG

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