John A. Adamik | Researchain

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Featured researches published by John A. Adamik.

Archive | 1986

Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1988

CVD of silicon oxide using TEOS decomposition and in-situ planarization process

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1988

Process for PECVD of silicon oxide using TEOS decomposition

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1991

Plasma-enhanced CVD process using TEOS for depositing silicon oxide

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1992

Thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process

David N-K. Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1987

TEOS based plasma enhanced chemical vapor deposition process for deposition of silicon dioxide films.

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1995

Apparatus for preventing deposition gases from contacting a selected region of a substrate during deposition processing

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1995

Method for protecting against deposition on a selected region of a substrate

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1993

Teos thermal cvd method

John A. Adamik; Kenneth S. Collins; Meidan Dan; S Raw Kam; Cissy Leung; Ilya Perlov; Salvador P. Umotoy; David Nin-Kou Wang; John M. White; パーロフイルヤ; エス．ロウカム; エスコリンズケニス; ピーウモトイサルヴァドル; リューンシシー; エイアダミクジョン; エムホワイトジョン; メイダンダン; ニンクーワンディヴィッド

Archive | 1993