Is this you? Create Your Porfile
Avatar

Salvador P. Umotoy

Applied Materials

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Salvador P. Umotoy is active.

Explore More

Publication

Featured researches published by Salvador P. Umotoy.

Archive | 1986

Thermal CVD/PECVD reactor and use for thermal chemical vapor deposition of silicon dioxide and in-situ multi-step planarized process

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 1988

CVD of silicon oxide using TEOS decomposition and in-situ planarization process

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 2004

Dual gas faceplate for a showerhead in a semiconductor wafer processing system

Salvador P. Umotoy; Lawrence Chung-Lai Lei; Anh N. Nguyen; Steve H. Chiao; Hanh D. Nguyen

Archive | 1988

Process for PECVD of silicon oxide using TEOS decomposition

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 2000

One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system

Salvador P. Umotoy; Lawrence C. Lei; Anh N. Nguyen; Steve H. Chiao

Archive | 2001

Lid assembly for a processing system to facilitate sequential deposition techniques

Gwo-Chuan Tzu; Salvador P. Umotoy

Archive | 1991

Plasma-enhanced CVD process using TEOS for depositing silicon oxide

David Nin-Kou Wang; John M. White; Kam S. Law; Cissy Leung; Salvador P. Umotoy; Kenneth S. Collins; John A. Adamik; Ilya Perlov; Dan Maydan

Archive | 2003

Apparatus for cyclical deposition of thin films

Randhir Thakur; Alfred Mak; Ming Xi; Walter Benjamin Glenn; Ahmad A. Khan; Ayad Al-Shaikh; Avgerinos V. Gelatos; Salvador P. Umotoy

Archive | 1998

High temperature chemical vapor deposition chamber

Salvador P. Umotoy; Steve H. Chiao; Anh N. Nguyen; Be Van Vo; Joel M. Huston; James Jin-Long Chen; Lawrence Chung-Lai Lei

Archive | 2002

Showerhead assembly for a processing chamber

Mark M. Hytros; Truc T. Tran; Hongbee Teoh; Lawrence Chung-Lai Lei; Avgerinos V. Gelatos; Salvador P. Umotoy

Explore More

Collaboration

Dive into the Salvador P. Umotoy's collaboration.

Top Co-Authors
Avatar

Lawrence Chung-Lai Lei

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Cissy Leung

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Ilya Perlov

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

John A. Adamik

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

John M. White

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Kenneth S. Collins

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

David Nin-Kou Wang

University of Utah

View shared research outputs
Top Co-Authors
Avatar

Joseph Yudovsky

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Kam S. Law

Applied Materials

View shared research outputs
Top Co-Authors
Avatar

Karl A. Littau

Applied Materials

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge