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Dive into the research topics where John G. Ekerdt is active.

Publication


Featured researches published by John G. Ekerdt.


Archive | 2001

Template for room temperature, low pressure micro-and nano-imprint lithography

Todd Bailey; Byung Jin Choi; Matthew E. Colburn; S. V. Sreenivasan; C. Grant Willson; John G. Ekerdt


Archive | 2001

Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography

Byung Jin Choi; Matthew E. Colburn; S. V. Sreenivasan; C. Grant Willson; Todd Bailey; John G. Ekerdt


Archive | 2001

Method and system of automatic fluid dispensing for imprint lithography processes

Byung Jin Choi; Sidlgata V. Sreenivasan; Carlton Grant Willson; Matthew Colburn; Todd Bailey; John G. Ekerdt


Archive | 2004

Imprint lithography templates having alignment marks

Todd Bailey; Stephen C. Johnson; Matthew Colburn; Byung-Jin Choi; Britain Smith; John G. Ekerdt; Carlton Grant Willson; Sidlgata V. Sreenivasan


Archive | 2003

Device for holding a template for use in imprint lithography

Todd Bailey; Byung-Jin Choi; Matthew Colburn; Sidlgata V. Sreenivasan; Carlton Grant Willson; John G. Ekerdt


Archive | 2004

Imprint lithography template having a feature size under 250 nm

Todd Bailey; Byung-Jin Choi; Matthew Colburn; Sidlgata V. Sreenivasan; Carlton Grant Willson; John G. Ekerdt


Archive | 2004

Method of creating a dispersion of a liquid on a substrate

Todd Bailey; Byung Jin Choi; Matthew Colburn; Sidlgata V. Sreenivasan; C. Grant Willson; John G. Ekerdt


Archive | 2004

Release layer comprising diamond-like carbon (DLC) or doped DLC with tunable composition for imprint lithography templates and contact masks

Todd Bailey; Nicholas A. Stacey; Edward R. Engbrecht; John G. Ekerdt


Archive | 2007

Method of Automatic Fluid Dispensing for Imprint Lithography Processes

Byung-Jin Choi; Sidlgata V. Sreenivasan; Carlton Grant Willson; Mattherw E. Colburn; Todd Bailey; John G. Ekerdt


Archive | 2004

Methods of forming boron carbo-nitride layers for integrated circuit devices

Edward R. Engbrecht; John G. Ekerdt; Y.-M. Sun; Kurt H. Junker

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Byung Jin Choi

University of Texas at Austin

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C. Grant Willson

University of Texas System

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Matthew Colburn

University of Texas System

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Byung-Jin Choi

University of Texas System

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S. V. Sreenivasan

University of Texas at Austin

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