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Todd Bailey

University of Texas System

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Publication

Featured researches published by Todd Bailey.

Archive | 2001

Method and system of automatic fluid dispensing for imprint lithography processes

Byung Jin Choi; Sidlgata V. Sreenivasan; Carlton Grant Willson; Matthew Colburn; Todd Bailey; John G. Ekerdt

Archive | 2003

High resolution overlay alignment systems for imprint lithography

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2003

Method of varying template dimensions to achieve alignment during imprint lithography

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2003

Imprint lithography template comprising alignment marks

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2004

Imprint lithography templates having alignment marks

Todd Bailey; Stephen C. Johnson; Matthew Colburn; Byung-Jin Choi; Britain Smith; John G. Ekerdt; Carlton Grant Willson; Sidlgata V. Sreenivasan

Archive | 2003

Device for holding a template for use in imprint lithography

Todd Bailey; Byung-Jin Choi; Matthew Colburn; Sidlgata V. Sreenivasan; Carlton Grant Willson; John G. Ekerdt

Archive | 2004

Imprint lithography template having a feature size under 250 nm

Todd Bailey; Byung-Jin Choi; Matthew Colburn; Sidlgata V. Sreenivasan; Carlton Grant Willson; John G. Ekerdt

Archive | 2004

Imprint lithography template having a mold to compensate for material changes of an underlying liquid

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2004

Method of aligning a template with a substrate employing moire patterns

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2004

Method of determining alignment of a template and a substrate having a liquid disposed therebetween

Sidlgata V. Sreenivasan; Byung-Jin Choi; Matthew Colburn; Todd Bailey

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Matthew Colburn

University of Texas System

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Sidlgata V. Sreenivasan

University of Texas System

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Byung Jin Choi

University of Texas System

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John G. Ekerdt

University of Texas System

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Byung-Jin Choi

University of Texas System

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Carlton Grant Willson

University of Texas System

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C. Grant Willson

University of Texas System

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Britain Smith

University of Texas System

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Edward R. Engbrecht

University of Texas System

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John Eckerdt

University of Texas System

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