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Byung Jin Choi

University of Texas System

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Publication

Featured researches published by Byung Jin Choi.

Archive | 2000

High precision orientation alignment and gap control stages for imprint lithography processes

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2001

Method and system of automatic fluid dispensing for imprint lithography processes

Byung Jin Choi; Sidlgata V. Sreenivasan; Carlton Grant Willson; Matthew Colburn; Todd Bailey; John G. Ekerdt

Archive | 2003

High resolution overlay alignment systems for imprint lithography

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2003

Method of varying template dimensions to achieve alignment during imprint lithography

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2003

Imprint lithography template comprising alignment marks

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2001

Flexure based macro motion translation stage

Byung Jin Choi; Sidlgata V. Sreenivasan

Archive | 2004

Imprint lithography template having a mold to compensate for material changes of an underlying liquid

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2004

Method of aligning a template with a substrate employing moire patterns

Sidlgata V. Sreenivasan; Byung Jin Choi; Matthew Colburn; Todd Bailey

Archive | 2003

Method of separating a template from a substrate during imprint lithography

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

Archive | 2004

Apparatus to orientate a body with respect to a surface

Byung Jin Choi; Sidlgata V. Sreenivasan; Stephen C. Johnson

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Collaboration

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Sidlgata V. Sreenivasan

University of Texas System

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Matthew Colburn

University of Texas System

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Todd Bailey

University of Texas System

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Stephen C. Johnson

University of Texas System

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C. Grant Willson

University of Texas System

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John G. Ekerdt

University of Texas System

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Carlton Grant Willson

University of Texas System

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Ian Matthew McMackin

University of Texas System

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John Eckerdt

University of Texas System

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S. V. Screenivasans

University of Texas System

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