Byung Jin Choi

High precision orientation alignment and gap control stages for imprint lithography processes

Method and system of automatic fluid dispensing for imprint lithography processes

High resolution overlay alignment systems for imprint lithography

Method of varying template dimensions to achieve alignment during imprint lithography

Imprint lithography template comprising alignment marks

Flexure based macro motion translation stage

Imprint lithography template having a mold to compensate for material changes of an underlying liquid

Method of aligning a template with a substrate employing moire patterns

Method of separating a template from a substrate during imprint lithography

Apparatus to orientate a body with respect to a surface