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Dive into the research topics where John K. Zahurak is active.

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Featured researches published by John K. Zahurak.


international electron devices meeting | 2014

Process integration of a 27nm, 16Gb Cu ReRAM

John K. Zahurak; Koji Miyata; Mark Fischer; Murali Balakrishnan; Sameer Chhajed; David H. Wells; Hong Li; Alessandro Torsi; Jay Lim; Mark S. Korber; Keiichi Nakazawa; Satoru Mayuzumi; Motonari Honda; Scott E. Sills; Shuichiro Yasuda; Alessandro Calderoni; Beth R. Cook; Gowri Damarla; Hai Tran; Bei Wang; Chris Cardon; Kamal M. Karda; Jun Okuno; Adam Johnson; Takafumi Kunihiro; Jun Sumino; Masanori Tsukamoto; Katsuhisa Aratani; Nirmal Ramaswamy; Wataru Otsuka

A 27nm 16Gb Cu based NV Re-RAM chip has been demonstrated. Novel process introduction to enable this technology include a Damascene Cell, Line-SAC Digit Lines filled with Cu, exhumed-silicided array contacts, raised epitaxial arrays, and high-drive buried access devices.


Archive | 1996

Process for improving roughness of conductive layer

Shubneesh Batra; Pierre C. Fazan; John K. Zahurak


Archive | 1996

Increased interior volume for integrated memory cell

John K. Zahurak; Richard H. Lane


Archive | 2001

Semiconductor processing methods of forming integrated circuitry memory devices, methods of forming capacitor containers, methods of making electrical connection to circuit nodes and related integrated circuitry

Richard H. Lane; John K. Zahurak


Archive | 2011

Methods of forming recessed access devices associated with semiconductor constructions

Kunal R. Parekh; Suraj Mathew; Jigish D. Trivedi; John K. Zahurak; Sanh D. Tang


Archive | 2002

Silicon on insulator DRAM process utilizing both fully and partially depleted devices

Charles H. Dennison; John K. Zahurak


Archive | 1995

Semiconductor processing method of providing a conductively doped layer of hemispherical grain polysilicon

John K. Zahurak; Klaus F. Schuegraf; Randhir P. S. Thakur


Archive | 1999

Methods of forming capacitors DRAM arrays, and monolithic integrated circuits

Kunal R. Parekh; John K. Zahurak; Phillip G. Wald


Archive | 2002

Isolation region forming methods

David L. Dickerson; Richard H. Lane; Charles H. Dennison; Kunal R. Parekh; Mark Fischer; John K. Zahurak


Archive | 1997

Methods of forming capacitors and DRAM arrays

Kunal R. Parekh; John K. Zahurak

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