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Dive into the research topics where John Vincent Schmitt is active.

Publication


Featured researches published by John Vincent Schmitt.


Archive | 1998

Method and apparatus for depositing material upon a semiconductor wafer using a transition chamber of a multiple chamber semiconductor wafer processing system

Xin Sheng Guo; John Vincent Schmitt; Shih-Hung Li


Archive | 1998

Method and apparatus for improved control of process and purge material in a substrate processing system

John Vincent Schmitt; Frank Chang; Xin Shen Guo; Ling Chen; Christophe Marcadal


Archive | 1997

Chemical vapor deposition hot-trap for unreacted precursor conversion and effluent removal

John Vincent Schmitt; Ling Chen; George Michael Bleyle; Yu Cong; Alfred Mak; Mei Chang


Archive | 2000

Methods and apparatus for improved vaporization of deposition material in a substrate processing system

John Vincent Schmitt; Shih-Hung Li; Christophe Marcadal; Anzhong Chang; Ling Chen


Archive | 2000

Method for unreacted precursor conversion and effluent removal

John Vincent Schmitt; Ling Chen; George Michael Bleyle; Yu Cong; Alfred Mak; Mei Chang


Archive | 1999

Apparatus and method for controlling a flow of process material to a deposition chamber

Keith K. Koai; Tung-Ching Tseng; James Jin-Long Chen; Mark Johnson; John Vincent Schmitt; Sean Li


Archive | 1998

Measurement of quantity of incompressible substance in a closed container

John Vincent Schmitt; Richard A. Marsh


Archive | 2001

Uniform heat trace and secondary containment for delivery lines for processing system

John Vincent Schmitt


Archive | 1997

Method and apparatus for monitoring the condition of a vaporizer for generating liquid chemical vapor

John Vincent Schmitt


Archive | 1997

Method and apparatus for monitoring generation of liquid chemical vapor

John Vincent Schmitt

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