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Frank Chang

Applied Materials

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Publication

Featured researches published by Frank Chang.

Archive | 1998

Vaporization and deposition apparatus and process

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang

Archive | 1999

Chemical vapor deposition vaporizer

Jun Zhao; Lee Luo; Xiaoliang Jin; Frank Chang; Charles Dornfest; Po Tang

Archive | 1997

Vaporization and deposition apparatus

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang

Archive | 1998

Method and apparatus for improved control of process and purge material in a substrate processing system

John Vincent Schmitt; Frank Chang; Xin Shen Guo; Ling Chen; Christophe Marcadal

Archive | 1998

Vaporization apparatus and process

Charles Dornfest; Jun Zhao; Vincent Ku; Po Tang; Talex Sajoto; Frank Chang

Archive | 1999

High temperature filter for CVD apparatus

Jun Zhao; Charles Dornfest; Frank Chang; Xiaoliang Jin; Po Tang

Archive | 1999

High termperature filter

Jun Zhao; Charles Dornfest; Frank Chang; Xiaoliang Jin; Po Tang

Archive | 1996

Shielded substrate support for processing chamber

Jun Zhao; Frank Chang; Charles Dornfest

Archive | 1999

Vaporisateur pour depot chimique en phase vapeur

Jun Zhao; Lee Luo; Xiaoliang Jin; Frank Chang; Charles Dornfest; Po Tang

Archive | 1999

Appareil de depot chimique en phase vapeur

John Vincent Schmitt; Frank Chang; Xin Sheng Guo; Ling Chen; Christophe Marcadal

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Collaboration

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Charles Dornfest

Applied Materials

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Jun Zhao

Applied Materials

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Po Tang

Applied Materials

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Talex Sajoto

Applied Materials

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Vincent Ku

Applied Materials

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Chris Wang

Applied Materials

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Leonid Selyutin

Applied Materials

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Sasson Somekh

Applied Materials

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Xiaoliang Jin

Applied Materials

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Christophe Marcadal

Applied Materials

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