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Dive into the research topics where Frank Chang is active.

Publication


Featured researches published by Frank Chang.


Archive | 1998

Vaporization and deposition apparatus and process

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang


Archive | 1999

Chemical vapor deposition vaporizer

Jun Zhao; Lee Luo; Xiaoliang Jin; Frank Chang; Charles Dornfest; Po Tang


Archive | 1997

Vaporization and deposition apparatus

Sasson Somekh; Jun Zhao; Charles Dornfest; Talex Sajoto; Leonid Selyutin; Vincent Ku; Chris Wang; Frank Chang; Po Tang


Archive | 1998

Method and apparatus for improved control of process and purge material in a substrate processing system

John Vincent Schmitt; Frank Chang; Xin Shen Guo; Ling Chen; Christophe Marcadal


Archive | 1998

Vaporization apparatus and process

Charles Dornfest; Jun Zhao; Vincent Ku; Po Tang; Talex Sajoto; Frank Chang


Archive | 1999

High temperature filter for CVD apparatus

Jun Zhao; Charles Dornfest; Frank Chang; Xiaoliang Jin; Po Tang


Archive | 1999

High termperature filter

Jun Zhao; Charles Dornfest; Frank Chang; Xiaoliang Jin; Po Tang


Archive | 1996

Shielded substrate support for processing chamber

Jun Zhao; Frank Chang; Charles Dornfest


Archive | 1999

Vaporisateur pour depot chimique en phase vapeur

Jun Zhao; Lee Luo; Xiaoliang Jin; Frank Chang; Charles Dornfest; Po Tang


Archive | 1999

Appareil de depot chimique en phase vapeur

John Vincent Schmitt; Frank Chang; Xin Sheng Guo; Ling Chen; Christophe Marcadal

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