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Joseph P. Caulfield

Applied Materials

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Publication

Featured researches published by Joseph P. Caulfield.

Archive | 1999

Process for etching oxide using hexafluorobutadiene or related fluorocarbons and manifesting a wide process window

Hoiman Raymond Hung; Joseph P. Caulfield; Hongching Shan; Ruiping Wang; Gerald Zheyao Yin

Archive | 1998

In-situ integrated oxide etch process particularly useful for copper dual damascene

Hoiman Hung; Joseph P. Caulfield; Sum-Yee Betty Tang; Jian Ding; Tianzong Xu

Archive | 1999

Process for etching oxide using a hexafluorobutadiene and manifesting a wide process window

Hoiman Hung; Joseph P. Caulfield; Hongqing Shan; Ruiping Wang; Gerald Zheyao Yin

Archive | 1998

Oxide etch process using hexafluorobutadiene and related unsaturated hydrofluorocarbons

Raymond Hung; Joseph P. Caulfield; Hongching Shan; Ruiping Wang; Gerald Zheyao Yin

Archive | 1997

Self aligned contact etch using difluoromethane and trifluoromethane

Raymond Hung; Jian Ding; Joseph P. Caulfield; Gerald Zheyao Yin

Archive | 2002

Highly selective process for etching oxide over nitride using hexafluorobutadiene

Hoiman Hung; Joseph P. Caulfield; Hongqing Shan; Ruiping Wang; Gerald Zheyao Yin

Archive | 1998

Integrated self aligned contact etch

Raymond Hung; Joseph P. Caulfield; Jian Ding

Archive | 2000

Highly selective oxide etch process using hexafluorobutadiene

Raymond Hung; Joseph P. Caulfield; Hongching Shan; Ruiping Wang; Gerald Zheyao Yin

Archive | 1999

Enhancement of silicon oxide etch rate and substrate selectivity with xenon addition

Hoiman Hung; Joseph P. Caulfield; Hongchin Shan; Kenneth S. Collins; Chunshi Cui; Michael R. Rice

Archive | 1999

Two-step integrated self aligned contact etch

Raymond Hung; Joseph P. Caulfield; Jian Ding

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Gerald Zheyao Yin

Applied Materials

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Raymond Hung

Applied Materials

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Ruiping Wang

Applied Materials

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Hoiman Hung

Applied Materials

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Hongqing Shan

Applied Materials

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Jian Ding

Applied Materials

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Chunshi Cui

Applied Materials

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Hoiman Raymond Hung

Applied Materials

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Hongching Shan

Applied Materials

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Kenneth S. Collins

Applied Materials

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