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Sang Ho Yu

Applied Materials

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Publication

Featured researches published by Sang Ho Yu.

Archive | 2009

Vapor deposition method for ternary compounds

Seshadri Ganguli; Srinivas Gandikota; Sang Ho Yu; Luis Felipe Hakim

Archive | 2013

BORON IONIZATION FOR ALUMINUM OXIDE ETCH ENHANCEMENT

Kai Wu; Sang Ho Yu; Kie Jin Park; Glen T. Mori; Joshua Collins

Archive | 2012

Formation of liner and barrier for tungsten as gate electrode and as contact plug to reduce resistance and enhance device performance

Sang-Hyeob Lee; Sang Ho Yu; Wei Ti Lee; Seshadri Ganguli; Hyoung-Chan Ha; Hoon Kim

Archive | 2011

NMOS metal gate materials, manufacturing methods, and equipment using CVD and ALD processes with metal based precursors

Seshadri Ganguli; Srinivas Gandikota; Yu Lei; Xinliang Lu; Sang Ho Yu; Hoon Kim; Paul F. Ma; Mei Chang; Maitreyee Mahajani; Patricia M. Liu

Archive | 2013

Method of enabling seamless cobalt gap-fill

Bhushan N. Zope; Avgerinos V. Gelatos; Bo Zheng; Yu Lei; Xinyu Fu; Srinivas Gandikota; Sang Ho Yu; Mathew Abraham

Archive | 2011

Metal gate structures and methods for forming thereof

Seshadri Ganguli; Sang Ho Yu; Sang-Hyeob Lee; Hyoung-Chan Ha; Wei Ti Lee; Hoon Kim; Srinivas Gandikota; Yu Lei; Kevin Moraes; Xianmin Tang

Archive | 2013

Tungsten growth modulation by controlling surface composition

Kai Wu; Kie Jin Park; Sang Ho Yu; Sang-Hyeob Lee; Kazuya Daito; Joshua Collins; Benjamin C. Wang

Archive | 2011

METHODS FOR FORMING BARRIER/SEED LAYERS FOR COPPER INTERCONNECT STRUCTURES

Hoon Kim; Sang Ho Yu; Seshadri Ganguli

Archive | 2014

Cobalt removal for chamber clean or pre-clean process

Kai Wu; Bo Zheng; Sang Ho Yu; Avgerinos V. Gelatos; Bhushan N. Zope; Jeffrey W. Anthis; Benjamin Schmiege

Archive | 2014

Methods for forming metal organic tungsten for middle of the line (mol) applications

Liqi Wu; Sang Ho Yu; Kazuya Daito; Kie Jin Park; Kai Wu; David Thompson

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Collaboration

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Seshadri Ganguli

Applied Materials

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Hoon Kim

Applied Materials

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Hyoung-Chan Ha

Applied Materials

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Kai Wu

Applied Materials

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Paul F. Ma

Applied Materials

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Sang-Hyeob Lee

Applied Materials

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Srinivas Gandikota

Applied Materials

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Jiang Lu

Applied Materials

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Kie Jin Park

Applied Materials

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Wei Ti Lee

Applied Materials

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