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Joung-Wei Liou

TSMC

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Publication

Featured researches published by Joung-Wei Liou.

Archive | 2005

High aspect ratio gap fill application using high density plasma chemical vapor deposition

Joung-Wei Liou; Tsang-Yu Liu; Chien-Feng Lin; Cheng-Liang Chang; Ming-Te Chen; Chia-hui Lin; Ying-Hsiu Tsai; Szu-an Wu; Yin-Ping Lee

Archive | 2010

Method of and apparatus for active energy assist baking

Chung-Chi Ko; Chia Cheng Chou; Keng-Chu Lin; Joung-Wei Liou; Shwang-Ming Jeng; Mei-Ling Chen

Archive | 2005

Systems and methods for optical measurement

Joung-Wei Liou; Jacky Huang; Chih-Ming Ke; Szu-An Wu

Archive | 2015

Hard mask for back-end-of-line (BEOL) interconnect structure

Joung-Wei Liou; Han-Ti Hsiaw; Keng-Chu Lin

Archive | 2015

Low-K Dielectric Layer and Porogen

Joung-Wei Liou; Hui-Chun Yang; Yu-Yun Peng; Keng-Chu Lin

Archive | 2014

Apparatus and Methods for Low K Dielectric Layers

Yu-Yun Peng; Keng-Chu Lin; Joung-Wei Liou; Hui-Chun Yang

Archive | 2012

Curing Low-k Dielectrics for Improving Mechanical Strength

Joung-Wei Liou; Keng-Chu Lin; Shwang-Ming Jeng

Archive | 2004

Method and apparatus for real-time control and monitor of deposition processes

Cheng-Hung Chang; Jhi-Cherng Lu; Joung-Wei Liou; Chu-Yun Fu; Weng Chang; Syung-Ming Jang

Archive | 2013

Mechanism of forming semiconductor device having support structure

Joung-Wei Liou; Keng-Chu Lin

Archive | 2013

Semiconductor Devices, Methods of Manufacture Thereof, and Inter-metal Dielectric (IMD) Structures

Yu-Yun Peng; Keng-Chu Lin; Joung-Wei Liou; Kuang-Yuan Hsu

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Keng-Chu Lin

TSMC

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Hui-Chun Yang

TSMC

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Yu-Yun Peng

TSMC

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Po-Cheng Shih

TSMC

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Chia Cheng Chou

TSMC

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Han-Ti Hsiaw

TSMC

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Mei-Ling Chen

TSMC

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Shwang-Ming Jeng

TSMC

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Chia-Cheng Chou

TSMC

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Chung-Chi Ko

TSMC

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