Juejun Hu

Mid-infrared materials and devices on a Si platform for optical sensing

Abstract In this article, we review our recent work on mid-infrared (mid-IR) photonic materials and devices fabricated on silicon for on-chip sensing applications. Pedestal waveguides based on silicon are demonstrated as broadband mid-IR sensors. Our low-loss mid-IR directional couplers demonstrated in SiNx waveguides are useful in differential sensing applications. Photonic crystal cavities and microdisk resonators based on chalcogenide glasses for high sensitivity are also demonstrated as effective mid-IR sensors. Polymer-based functionalization layers, to enhance the sensitivity and selectivity of our sensor devices, are also presented. We discuss the design of mid-IR chalcogenide waveguides integrated with polycrystalline PbTe detectors on a monolithic silicon platform for optical sensing, wherein the use of a low-index spacer layer enables the evanescent coupling of mid-IR light from the waveguides to the detector. Finally, we show the successful fabrication processing of our first prototype mid-IR waveguide-integrated detectors.

Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor

We have fabricated and tested, to the best of our knowledge, the first microfluidic device monolithically integrated with planar chalcogenide glass waveguides on a silicon substrate. High-quality Ge(23)Sb(7)S(70) glass films have been deposited onto oxide coated silicon wafers using thermal evaporation, and high-index-contrast channel waveguides have been defined using SF(6) plasma etching. Microfluidic channel patterning in photocurable resin (SU8) and channel sealing by a polydimethylsiloxane (PDMS) cover completed the device fabrication. The chalcogenide waveguides yield a transmission loss of 2.3 dB/cm at 1550 nm. We show in this letter that using this device, N-methylaniline can be detected using its well-defined absorption fingerprint of the N-H bond near 1496 nm. Our measurements indicate linear response of the sensor to varying N-methylaniline concentrations. From our experiments, a sensitivity of this sensor down to a N-methylaniline concentration 0.7 vol. % is expected. Given the low-cost fabrication process used, and robust device configuration, our integration scheme provides a promising device platform for chemical sensing applications.

Design guidelines for optical resonator biochemical sensors

We propose a design tool for dielectric optical resonator-based biochemical refractometry sensors. Analogous to the widely accepted photodetector figure of merit, the detectivity D*, we introduce a new sensor system figure of merit, the time-normalized sensitivity S*, to permit quantitative, cross-technology-platform comparison between resonator sensors with distinctive device designs and interrogation configurations. The functional dependence of S* on device parameters, such as resonant cavity quality factor (Q), extinction ratio, system noise, and light source spectral bandwidth, is evaluated by using a Lorentzian peak fitting algorithm and Monte Carlo simulations to provide theoretical insights and useful design guidelines for optical resonator sensors. Importantly, we find that S* critically depends on the cavity Q factor, and we develop a method of optimizing sensor resolution and sensitivity to noise as a function of cavity Q factor. Finally, we compare the simulation predictions of sensor wavelength resolution with experimental results obtained in Ge17Sb12S71 resonators, and good agreement is confirmed.

Integrated flexible chalcogenide glass photonic devices

Photonic integration on plastic substrates enables emerging applications ranging from flexible interconnects to conformal sensors on biological tissues. Such devices are traditionally fabricated using pattern transfer, which is complicated and has limited integration capacity. Here we pioneered a monolithic approach to realize flexible, high-index-contrast glass photonics with significantly improved processing throughput and yield. Noting that the conventional multilayer bending theory fails when laminates have large elastic mismatch, we derived a mechanics theory accounting for multiple neutral axes in one laminated structure to accurately predict its strain-optical coupling behavior. Through combining monolithic fabrication and local neutral axis designs, we fabricated devices that boast record optical performance (Q=460,000) and excellent mechanical flexibility enabling repeated bending down to sub-millimeter radius without measurable performance degradation, both of which represent major improvements over state-of-the-art. Further, we demonstrate that our technology offers a facile fabrication route for 3-D high-index-contrast photonics difficult to process using traditional methods.

Planar waveguide-coupled, high-index-contrast, high-Q resonators in chalcogenide glass for sensing

High-index-contrast compact microdisk resonators in thermally evaporated As2S3 and Ge17Sb12S71 chalcogenide glass films are designed and fabricated using standard UV lithography and characterized. Our pulley coupler configuration demonstrates coupling of the resonators to monolithically integrated photonic wire waveguides without resorting to demanding fine-line lithography. Microdisk resonators in As2S3 support whispering-gallery-mode with cavity quality factors (Q) exceeding 2 x 10(5), the highest Q value reported in resonator structures in chalcogenide glasses to the best of our knowledge. We have successfully demonstrated a lab-on-a-chip prototype sensor device with the integration of our resonator with planar microfluidic systems. The sensor shows a refractive index sensitivity of 182 nm/RIU (refractive index unit) and a wavelength resolution of 0.1 pm through a resonant peak fit. This corresponds to a refractive index detection limit of 8 x 10(-7) RIU at 1550 nm in wavelength, which could be further improved by shifting the operating wavelength to a region where water absorption is reduced.

Ultracompact, broadband slot waveguide polarization splitter

In this letter, we demonstrate an ultracompact polarization splitter design leveraging the giant birefringence of silicon-on-insulator slot waveguides. The fabricated splitter device has a coupling length of only 13.6 μm, and shows average polarization extinction ratios of 21 dB and 17 dB for the TE and TM polarizations, respectively, over the entire C-band.

Flexible integrated photonics: where materials, mechanics and optics meet [Invited]

While the vast majority of integrated photonic devices are traditionally fabricated on rigid substrates, photonic integration of both passive and active photonic devices on flexible polymer substrates has been demonstrated in recent years, and its applications in imaging, sensing and optical interconnects are being actively pursued. This paper presents an overview of the emerging field of mechanically flexible photonics, where we examine material processing and mechanical design rationales dictated by application-specific optical functionalities. The examples include semiconductor nanomembranes which serve as the key enabling material for hybrid inorganic-organic flexible active photonics, and monolithically integrated passive photonic structures fabricated from semiconductors, polymers, or amorphous materials. Technical challenges and further research opportunities related to materials engineering and device integration on flexible substrates are also discussed.

Athermal operation of Silicon waveguides: spectral, second order and footprint dependencies

We report the design criteria and performance of Si ring resonators for passive athermal applications in wavelength division multiplexing (WDM). The waveguide design rules address i) positive-negative thermo-optic (TO) composite structures, ii) resonant wavelength dependent geometry to achieve constant confinement factor (Gamma), and iii) observation of small residual second order effects. We develop exact design requirements for a temperature dependent resonant wavelength shift (TDWS) of 0 pm/K and present prototype TDWS performance of 0.5 pm/K. We evaluate the materials selection tradeoffs between high-index contrast (HIC) and low-index contrast (LIC) systems and show, remarkably, that FSR and footprint become comparable under the constraint of athermal design.

Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

We demonstrate, for the first time to the best of our knowledge, low-loss, Si-CMOS-compatible fabrication of single-mode chalcogenide strip waveguides. As a novel route of chalcogenide glass film patterning, lift-off allows several benefits: leverage with Si-CMOS process compatibility; ability to fabricate single-mode waveguides with core sizes down to submicron range; and reduced sidewall roughness. High-index-contrast Ge(23)Sb(7)S(70) strip waveguides have been fabricated using lift-off with excellent uniformity of loss propagation and the lowest loss figure of reported to date. We also show that small core Ge(23)Sb(7)S(70) rib waveguides can be fabricated via lift-off as well, with loss figures lower than 0.5 dB/cm. Additionally, we find through waveguide modal analysis that although overall transmission loss is low, the predominant source of this loss comes from scattering at the sidewalls.

Integrated chalcogenide waveguide resonators for mid-IR sensing: leveraging material properties to meet fabrication challenges

In this paper, attributes of chalcogenide glass (ChG) based integrated devices are discussed in detail, including origins of optical loss and processing steps used to reduce their contributions to optical component performance. Specifically, efforts to reduce loss and tailor optical characteristics of planar devices utilizing solution-based glass processing and thermal reflow techniques are presented and their results quantified. Post-fabrication trimming techniques based on the intrinsic photosensitivity of the chalcogenide glass are exploited to compensate for fabrication imperfections of ring resonators. Process parameters and implications on enhancement of device fabrication flexibility are presented.