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Kang Sub Yim

Applied Materials

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Publication

Featured researches published by Kang Sub Yim.

Archive | 2002

Method and apparatus for deposition of low dielectric constant materials

Kang Sub Yim; Soovo Sen; Dian Sugiarto; Peter Wai-Man Lee; Ellie Yieh

Archive | 2004

Ultra low dielectric materials based on hybrid system of linear silicon precursor and organic porogen by plasma-enhanced chemical vapor deposition (PECVD)

Kang Sub Yim; Yi Zheng; Srinivas D. Nemani; Li-Qun Xia; Eric Hollar

Archive | 2004

Low dielectric (low k) barrier films with oxygen doping by plasma-enhanced chemical vapor deposition (pecvd)

Kang Sub Yim; Melissa M. Tam; Dian Sugiarto; Chi-I Lang; Peter Wai-Man Lee; Li-Qun Xia

Archive | 2002

Method for producing semiconductor including forming a layer containing at least silicon carbide and forming a second layer containing at least silicon oxygen carbide

Kang Sub Yim; Melissa M. Tam; Dian Sugiarto; Chi-I Lang; Peter Wai-Man Lee; Li-Qun Xia

Archive | 2008

METHODS TO PROMOTE ADHESION BETWEEN BARRIER LAYER AND POROUS LOW-K FILM DEPOSITED FROM MULTIPLE LIQUID PRECURSORS

Kelvin Chan; Kang Sub Yim; Alexandros T. Demos

Archive | 2005

Ultra low dielectric materials based on hybrid system of linear silicon precursor and organic porogen

Kang Sub Yim; Yi Zheng; Srinivas D. Nemani; Li-Qun Xia; Eric Hollar

Archive | 2014

Post treatment for constant reduction with pore generation on low-k dielectric films

Kang Sub Yim; Pendar Ardalan; Sure Ngo; Alexandros T. Demos

Archive | 2008

Structure et procédé pour interfaces sicoh présentant une résistance mécanique accrue

Daniel C. Edelstein; Alexandros T. Demos; Stephen M. Gates; Alfred Grill; Steven E. Molis; Vu Ngoc Tran Nguyen; Steven Reiter; Darryl D. Restaino; Kang Sub Yim

Archive | 2006

Amélioration de sources distantes de plasma pour nettoyer les films diélectriques

Thomas Nowak; Kang Sub Yim; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Vu Ngoc Tran Nguyen; Dennis Singleton; Martin Jay Seamons; Karthik Janakiraman; Ganesh Balasubramanian; Mohamed Ayoub; Wendy H. Yeh; Alexandros T. Demos; Hichem M'Saad

Archive | 2006

Verbesserung von fernplasmaquellenreinigung für dielektrische filme

Thomas Nowak; Kang Sub Yim; Sum-Yee Betty Tang; Kwangduk Douglas Lee; Vu Ngoc Tran Nguyen; Dennis Singleton; Martin Jay Seamons; Karthik Janakiraman; Ganesh Balasubramanian; Mohamed Ayoub; Wendy H. Yeh; Alexandros T. Demos; Saad Hichem M

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Collaboration

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Alexandros T. Demos

Air Products

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Li-Qun Xia

Applied Materials

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Dian Sugiarto

Applied Materials

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Peter Wai-Man Lee

Applied Materials

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Eric Hollar

Applied Materials

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Melissa M. Tam

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Vu Ngoc Tran Nguyen

Applied Materials

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Yi Zheng

Applied Materials

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Chi-I Lang

Applied Materials

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