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Karl M. Brown

Applied Materials

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Publication

Featured researches published by Karl M. Brown.

Archive | 2009

Electrostatic chuck assembly

Steven V. Sansoni; Cheng-Hsiung Tsai; Shambhu N. Roy; Karl M. Brown; Vijay D. Parkhe; Hari Ponnekanti

Archive | 2002

Pedestal with integral shield

Karl M. Brown; Vineet Mehta; See-Eng Phan; Semyon Sherstinsky; Allen Lau

Archive | 2005

Detachable electrostatic chuck for supporting a substrate in a process chamber

Karl M. Brown; Semyon Sherstinsky; Wei W. Wang; Cheng-Hsiung Tsai; Vineet Mehta; Allen Lau; Steve Sansoni

Archive | 2004

Detachable electrostatic chuck

Karl M. Brown; Nora Arellano; Semyon Sherstinsky; Allen Lau; Cheng-Hsiung Tsai; Vineet Mehta; Steve Sansoni; Wei W. Wang

Archive | 2005

Physical vapor deposition plasma reactor with RF source power applied to the target and having a magnetron

Karl M. Brown; John Pipitone; Vineet Mehta

Archive | 2001

Method and apparatus for conditioning an electrostatic chuck

Karl M. Brown

Archive | 2008

Physical vapor deposition reactor with circularly symmetric rf feed and dc feed to the sputter target

Daniel J. Hoffman; Ying Rui; Karl M. Brown; John Pipitone; Lara Hawrylchak

Archive | 2005

Apparatus for metal plasma vapor deposition and re-sputter with source and bias power frequencies applied through the workpiece

Karl M. Brown; John Pipitone; Vineet Mehta

Archive | 2003

Lower pedestal shield

Karl M. Brown; Vineet Mehta; See-Eng Phan; Semyon Sherstinsky; Allen Lau

Archive | 2002

Pedestal assembly with enhanced thermal conductivity

Cheng-Hsiung Tsai; Karl M. Brown; Thomas Brezoczky

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Collaboration

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Vineet Mehta

Applied Materials

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John Pipitone

Applied Materials

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Cheng-Hsiung Tsai

Applied Materials

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Hooman Bolandi

Applied Materials

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Daniel J. Hoffman

Applied Materials

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Donald J. K. Olgado

Applied Materials

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Semyon Sherstinsky

Applied Materials

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Victor Pebenito

Applied Materials

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Allen Lau

Applied Materials

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Connie P. Wang

Applied Materials

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