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Dive into the research topics where Semyon Sherstinsky is active.

Publication


Featured researches published by Semyon Sherstinsky.


Archive | 2000

Heater for processing chamber

Semyon Sherstinsky; Alison Gilliam; Paul Smith; Leonel A. Zuniga; Ted Yoshidome; Nitin Khurana; Rod Mosely; Umesh Kelkar; Joseph Yudovsky; Alan Popiolkowski


Archive | 1993

Clamping ring and susceptor therefor

Semyon Sherstinsky; Charles C. Harris; Mei Chang; Dale R. Du Bois; James F. Roberts; Susan Telford; Ronald L. Rose; Meng C. Tseng; Karl A. Littau


Archive | 1995

ELECTROSTATIC CHUCK WITH CONFORMAL INSULATOR FILM

Shamouil Shamouilian; Sasson Somekh; Hyman J. Levinstein; Manoocher Birang; Semyon Sherstinsky; John F. Cameron


Archive | 1992

Plasma etching apparatus with conductive means for inhibiting arcing

Terrance Y. Lee; Fred C. Redeker; Petru N. Nitescu; Robert J. Steger; David W. Groechel; Semyon Sherstinsky; Maya Shendon; Samuel Luong


Archive | 2002

Pedestal with integral shield

Karl M. Brown; Vineet Mehta; See-Eng Phan; Semyon Sherstinsky; Allen Lau


Archive | 2000

Substrate support member

Semyon Sherstinsky; Arnold Kholodenko; Calvin R. Augason; Samuel Wilson; Mike Phillips; Leonel A. Zuniga


Archive | 2005

Detachable electrostatic chuck for supporting a substrate in a process chamber

Karl M. Brown; Semyon Sherstinsky; Wei W. Wang; Cheng-Hsiung Tsai; Vineet Mehta; Allen Lau; Steve Sansoni


Archive | 1996

Apparatus for improving wafer and chuck edge protection

Bryan Pu; Hongching Shan; Kuang-Han Ke; Michael Welch; Semyon Sherstinsky; Alfred Mak; Ling Chen; Sue Zhang; Leonel A. Zuniga; Samuel Wilson


Archive | 2004

Detachable electrostatic chuck

Karl M. Brown; Nora Arellano; Semyon Sherstinsky; Allen Lau; Cheng-Hsiung Tsai; Vineet Mehta; Steve Sansoni; Wei W. Wang


Archive | 1997

Apparatus and method for delivering a gas

Joseph Yudovsky; Kenneth Tsai; Steve Ghanayem; Semyon Sherstinsky

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