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Kazunori Maeda

Shin-Etsu Chemical

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Publication

Featured researches published by Kazunori Maeda.

Archive | 2007

Photoacid generators, chemically amplified resist compositions, and patterning process

Youichi Ohsawa; Kazunori Maeda; Satoshi Watanabe

Archive | 2001

Onium salts, photoacid generators, resist compositions, and patterning process

Youichi Ohsawa; Jun Watanabe; Kazunori Maeda

Archive | 2009

Resist composition, resist protective coating composition, and patterning process

Yuji Harada; Jun Hatakeyama; Kazunori Maeda; Tomohiro Kobayashi

Archive | 2008

Polymer compound, resist material, and method for patterning

Yuji Harada; Jun Hatakeyama; Tomohiro Kobayashi; Kazunori Maeda; 和規 前田; 裕次 原田; 知洋 小林; 畠山 潤

Archive | 2008

Resist material, resist protective film material and pattern forming method

Yuji Harada; Jun Hatakeyama; Tomohiro Kobayashi; Kazunori Maeda; 和規 前田; 裕次 原田; 知洋 小林; 畠山 潤

Archive | 2004

Novel sulfonyldiazomethanes, photoacid generators, resist compositions, and patterning process

Youichi Ohsawa; Katsuhiro Kobayashi; Yoshitaka Yanagi; Kazunori Maeda

Archive | 2008

Chemically amplified resist composition and manufacturing method of semiconductor integrated circuit device with such chemically amplified resist composition

Seiji Nagahara; Satoshi Watanabe; Kazunori Maeda

Archive | 2009

FLUORINATED MONOMER OF CYCLIC ACETAL STRUCTURE, POLYMER, RESIST PROTECTIVE COATING COMPOSITION, RESIST COMPOSITION, AND PATTERNING PROCESS

Takeru Watanabe; Satoshi Shinachi; Takeshi Kinsho; Koji Hasegawa; Yuji Harada; Jun Hatakeyama; Kazunori Maeda; Tomohiro Kobayashi

Archive | 2006

Positive resist composition, and patterning process using the same

Takanobu Takeda; Eiji Fukuda; Kazunori Maeda; Satoshi Watanabe

Archive | 2002

Sulfonyldiazomethanes, photoacid generations, resist compositions, and patterning process

Youichi Ohsawa; Katsuhiro Kobayashi; Kazunori Maeda

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Collaboration

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Satoshi Watanabe

Shin-Etsu Chemical

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Youichi Ohsawa

Shin-Etsu Chemical

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Jun Hatakeyama

Shin-Etsu Chemical

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Tomohiro Kobayashi

Shin-Etsu Chemical

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Yuji Harada

Shin-Etsu Chemical

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Katsuhiro Kobayashi

Shin-Etsu Chemical

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Yoichi Osawa

Shin-Etsu Chemical

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Daisuke Kori

Shin-Etsu Chemical

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Eiji Fukuda

Shin-Etsu Chemical

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Jun Watanabe

Shin-Etsu Chemical

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