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Kazutaka Yanagita

Canon Inc.

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Publication

Featured researches published by Kazutaka Yanagita.

Archive | 2004

Sample processing system

Kazutaka Yanagita; Kazuaki Ohmi; Kiyofumi Sakaguchi

Archive | 2002

Sample separating apparatus and method, and substrate manufacturing method

Kazutaka Yanagita; Kazuaki Ohmi; Kiyofumi Sakaguchi

Archive | 1998

Method and apparatus for separating composite member using fluid

Kazuaki Ohmi; Takao Yonehara; Kiyofumi Sakaguchi; Kazutaka Yanagita

Archive | 1999

Composite member, its separation method, and preparation method of semiconductor substrate by utilization thereof

Kazuaki Ohmi; Kiyofumi Sakaguchi; Kazutaka Yanagita

Archive | 2000

Substrate and method of manufacturing the same

Kiyofumi Sakaguchi; Kazuaki Ohmi; Kazutaka Yanagita

Archive | 2004

Separating apparatus and processing method for plate member

Kazutaka Yanagita; Mitsuharu Kohda; Kiyofumi Sakaguchi; Akira Fujimoto

Archive | 2000

Method of separating composite member and process for producing thin film

Kazuaki Ohmi; Katsumi Nakagawa; Nobuhiko Sato; Kiyofumi Sakaguchi; Kazutaka Yanagita; Takao Yonehara

Archive | 2000

Composite member and separating method therefor, bonded substrate stack and separating method therefor, transfer method for transfer layer, and SOI substrate manufacturing method

Kazutaka Yanagita; Kazuaki Ohmi; Kiyofumi Sakaguchi; Hirokazu Kurisu

Archive | 1998

Wafer processing apparatus, wafer processing method, and semiconductor substrate fabrication method

Fumio Uehara; Kiyofumi Sakaguchi; Kazutaka Yanagita; Masakazu Harada

Archive | 1998

Porous region removing method and semiconductor substrate manufacturing method

Kiyofumi Sakaguchi; Kazutaka Yanagita

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Collaboration

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Kiyofumi Sakaguchi

Canon Inc.

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Kazuaki Ohmi

Canon Inc.

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Takao Yonehara

Canon Inc.

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Kazuaki Omi

Canon Inc.

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Hirokazu Kurisu

Canon Inc.

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Akira Fujimoto

Canon Inc.

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Kenji Yamagata

Canon Inc.

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Mitsuharu Kohda

Canon Inc.

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Nobuhiko Sato

Canon Inc.

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Fumio Uehara

Canon Inc.

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