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Kenichi Yamaga

Tokyo Electron

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Publication

Featured researches published by Kenichi Yamaga.

Archive | 2001

Thermal processing apparatus

Takanori Saito; Tsuyoshi Takizawa; Kenichi Yamaga

Archive | 2005

Heat treatment system

Takanori Saito; Kenichi Yamaga; Ken Nakao

Archive | 1993

Clean air apparatus

Katsumi Ishii; Takanobu Asano; Masaharu Abe; Kenichi Yamaga; Kazunari Sakata; Takashi Tanahashi; Syuji Moriya

Archive | 1989

Pitch changing device for changing pitches of plate-like objects and method of changing pitches

Takanobu Asano; Kenichi Yamaga; Wataru Ohkase

Archive | 1994

Method and apparatus for controlling temperature in rapid heat treatment system

Katsuo Nishi; Kazuo Terada; Wataru Ohkase; Kenichi Yamaga

Archive | 1998

Wafer processing apparatus, method of operating the same and wafer detecting system

Kenichi Yamaga; Yuji Ono; Masahiro Miyashita; Osamu Tanigawa

Archive | 1994

THERMAL TREATMENT DEVICE

Yukimasa Saito; Kenichi Yamaga; 健一 山賀; 幸正 斎藤

Archive | 1990

Semiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor wafer

Hironobu Nishi; Kenichi Yamaga; Takanobu Asano

Archive | 1997

Vertical heat treating apparatus

Masahiro Miyashita; Kenichi Yamaga; Katsuhiko Mihara

Archive | 2008

Heat-processing furnace and manufacuring method thereof

Ken Nakao; Kenichi Yamaga; Makoto Kobayashi

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Makoto Kobayashi

Tokyo Electron

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Takanori Saito

Tokyo Electron

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Ken Nakao

Tokyo Electron

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Masahiro Miyashita

Kyoto University

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Tomohisa Shimazu

Tokyo Electron

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Yukimasa Saito

Tokyo Electron

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Hiroyuki Yamamoto

Tokyo Electron

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Kazuhide Hasebe

Tokyo Electron

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Takashi Ichikawa

Tokyo Electron

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Tsuyoshi Takizawa

Tokyo Electron

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