Yukimasa Saito | Researchain

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Featured researches published by Yukimasa Saito.

Archive | 2002

Heat treatment apparatus and cleaning method of the same

Yukimasa Saito; Hitoshi Murata; Hiroyuki Yamamoto

Archive | 2000

Thermal processing system

Yukimasa Saito

Archive | 1994

THERMAL TREATMENT DEVICE

Yukimasa Saito; Kenichi Yamaga; 健一山賀; 幸正斎藤

Archive | 1999

Oxidation treatment method and apparatus

Yukimasa Saito; Hiroyuki Yamamoto

Archive | 1998

Method and device for oxidation

Yukimasa Saito; Hiroyuki Yamamoto; 博之山本; 幸正齋藤

Archive | 2005

Substrate conveying system and substrate conveying method

Yukimasa Saito; 幸正齋藤

Archive | 2003

Heat treatment apparatus and method therefor

Kazuhide Hasebe; Toshiyuki Makitani; Choei Osanai; Takanori Saito; Yukimasa Saito; Tomohisa Shimazu; Takeshi Takizawa; Kenichi Yamaga; Hiroyuki Yamamoto; 博之山本; 健一山賀; 知久島津; 孝規斎藤; 剛滝澤; 敏幸牧谷; 長栄長内; 一秀長谷部; 幸正齋藤

Archive | 2002

Thermal treating apparatus

Takanori Saito; Toshiyuki Makiya; Hisaei Osanai; Tsuyoshi Takizawa; Tomohisa Shimazu; Kazuhide Hasebe; Hiroyuki Yamamoto; Yukimasa Saito; Kenichi Yamaga

Archive | 2006

Thermal processing unit

Takanori Saito; Toshiyuki Makiya; Hisaei Osanai; Tsuyoshi Takizawa; Tomohisa Shimazu; Kazuhide Hasebe; Hiroyuki Yamamoto; Yukimasa Saito; Kenichi Yamaga

Archive | 2007