Tomohisa Shimazu | Researchain

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Archive | 1997

Heat-treating boat for semiconductor wafers

Tomohisa Shimazu; Ken Nakao

Archive | 2000

Vertical thermal treatment apparatus

Manabu Honma; Tomohisa Shimazu

Archive | 2000

Enveloping device and vertical heat-treating apparatus for semiconductor process system

Tomohisa Shimazu

Archive | 1982

HEAT TREATING JIG

Osamu Monoe; Tomohisa Shimazu; Kenichi Yamaga; 健一山賀; 知久島津; 修物江

Archive | 2003

Heat treatment apparatus and method therefor

Kazuhide Hasebe; Toshiyuki Makitani; Choei Osanai; Takanori Saito; Yukimasa Saito; Tomohisa Shimazu; Takeshi Takizawa; Kenichi Yamaga; Hiroyuki Yamamoto; 博之山本; 健一山賀; 知久島津; 孝規斎藤; 剛滝澤; 敏幸牧谷; 長栄長内; 一秀長谷部; 幸正齋藤

Archive | 1995

Heat treatment process for preventing slips in semiconductor wafers

Junichi Kobayashi; Eiichiro Takanabe; Harunori Ushikawa; Tomohisa Shimazu

Archive | 2002

Thermal treating apparatus

Takanori Saito; Toshiyuki Makiya; Hisaei Osanai; Tsuyoshi Takizawa; Tomohisa Shimazu; Kazuhide Hasebe; Hiroyuki Yamamoto; Yukimasa Saito; Kenichi Yamaga

Archive | 1994

Vertical heat treating apparatus

Tomohisa Shimazu; 知久島津

Archive | 2006

Thermal processing unit

Takanori Saito; Toshiyuki Makiya; Hisaei Osanai; Tsuyoshi Takizawa; Tomohisa Shimazu; Kazuhide Hasebe; Hiroyuki Yamamoto; Yukimasa Saito; Kenichi Yamaga

Archive | 2001