Kenji Tokunaga
Renesas Electronics
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Publication
Featured researches published by Kenji Tokunaga.
international symposium on semiconductor manufacturing | 1999
S. Kobayashi; Kenji Tokunaga; Yoshiyuki Kobayashi; Koji Kato; Teruo Minami
We have clarified the particle characteristics of a front opening unified pod (FOUP) and a load port unit (LPU) experimentally. The FOUP and LPU are fundamental components in 300-mm minienvironment systems. Our experiments showed that; (1) The particles per wafer pass (PWP) increases with the number of airborne particles outside the enclosure. (2) The particle characteristics of FOUP and LPU can be improved by reducing the FOUP door opening speed. (3) The PWP of the wafer in the top slot is remarkably high. By optimizing the FOUP door-opening speed, we can achieve FOUP and LPU particle characteristics similar to those of a standard mechanical interface (SMIF) system.
Archive | 2002
Kenji Tokunaga
Archive | 2000
Kenji Tokunaga; 謙二 徳永
Archive | 1998
Kenji Tokunaga; 謙二 徳永
Archive | 2001
Atsuhiro Fujii; Hisaharu Kiyota; Hiroshi Kondo; Kenji Tokunaga; 謙二 徳永; 久晴 清田; 淳弘 藤井; 浩 近藤
Archive | 1998
Yoshiaki Kobayashi; Kenji Tokunaga; 義明 小林; 謙二 徳永
Archive | 1998
Kazuya Ichikawa; Minoru Ikeda; Yoshio Iwata; Hide Kobayashi; Yoshiaki Kobayashi; Tomoyuki Masui; Shinji Nishihara; Kenji Tokunaga; Toshiyuki Uchino; Mitsuyasu Yagyu; Takashi Yamada; 敏幸 内野; 知幸 増井; 秀 小林; 義明 小林; 孝 山田; 義雄 岩田; 一弥 市川; 謙二 徳永; 充泰 柳生; 稔 池田; 晋 西原
Archive | 2002
Nobuyo Kimoto; Shakugen Kin; Masahiro Nishi; Terumi Rokusha; Kenji Tokunaga; Shinichi Watanabe; Yoshiaki Yamada; 輝美 六車; 義明 山田; 謙二 徳永; 信余 木元; 親一 渡辺; 正博 西
Archive | 2004
Yoshiaki Kobayashi; Shigeru Kobayashi; Kenji Tokunaga; Koji Kato; Teruo Minami
Archive | 2002
Shinyo Kimoto; Kenji Tokunaga; Seokhyun Kim; Terumi Muguruma; Yoshiaki Yamada; Shinichi Watanabe; Masahiro Nishi
