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Dive into the research topics where Kenric Choi is active.

Publication


Featured researches published by Kenric Choi.


Archive | 2007

Multi-gas straight channel showerhead

Brian H. Burrows; Alexander Tam; Ronald Stevens; Kenric Choi; James David Felsch; Jacob Grayson; Sumedh Acharya; Sandeep Nijhawan; Lori D. Washington; Nyi O. Myo


Archive | 2007

Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD system

Son T. Nguyen; Kedarnath Sangam; Miriam Schwartz; Kenric Choi; Sanjay Bhat; Pravin K. Narwankar; Shreyas Kher; Rahul Sharangapani; Shankar Muthukrishnan; Paul Deaton


Archive | 2008

Processing system for fabricating compound nitride semiconductor devices

Brian H. Burrows; Lori D. Washington; Ronald Stevens; Kenric Choi; Anthony F. White; Roger N. Anderson; Sandeep Nijhawan; Joshua J. Podesta; Alexander Tam


Archive | 2006

Ampoule for liquid draw and vapor draw with a continuous level sensor

Kenric Choi; Pravin K. Narwankar; Shreyas Kher; Son T. Nguyen; Paul Deaton; Khai Ngo; Paul Chhabra; Alan Ouye; Dien-Yeh Wu


Archive | 2010

HVPE SHOWERHEAD DESIGN

Brian H. Burrows; Alexander Tam; Ronald Stevens; Jacob Grayson; Kenric Choi; Sumedh Acharya; Sandeep Nijhawan; Olga Kryliouk; Yuriy Melnik


Archive | 2009

Heated valve manifold for ampoule

Kenric Choi; Son T. Nguyen


Archive | 2012

Reactant Delivery System For ALD/CVD Processes

Kenric Choi; Joseph Yudovsky; Steven D. Marcus; Ernesto Ulloa


Archive | 2010

METHODS FOR DETERMINING THE QUANTITY OF PRECURSOR IN AN AMPOULE

Joseph Yudovsky; Jeffrey Tobin; Patricia M. Liu; Faruk Gungor; Tai T. Ngo; Travis Tesch; Kenric Choi


Archive | 2009

Apparatuses for atomic layer deposition

Nyi O. Myo; Kenric Choi; Shreyas Kher; Pravin K. Narwankar; Steve Poppe; Craig Metzner; Paul Deaten


Archive | 2007

CROSS FLOW APPARATUS AND METHOD FOR HYDRIDE VAPOR PHASE DEPOSITION

Brian H. Burrows; Jacob Grayson; Nyi O. Myo; Ronald Stevens; Kenric Choi; Sumedh Acharya; Sandeep Nijhawan; Lori D. Washington

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