Nyi O. Myo | Researchain

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Featured researches published by Nyi O. Myo.

Archive | 2007

Multi-gas straight channel showerhead

Brian H. Burrows; Alexander Tam; Ronald Stevens; Kenric Choi; James David Felsch; Jacob Grayson; Sumedh Acharya; Sandeep Nijhawan; Lori D. Washington; Nyi O. Myo

Archive | 2011

Liner assembly for chemical vapor deposition chamber

David K. Carlson; Mehmet Tugrul Samir; Nyi O. Myo

Archive | 2006

TEMPERATURE CONTROLLED MULTI-GAS DISTRIBUTION ASSEMBLY

Nyi O. Myo; Steven Poppe; George Mattinger

Archive | 2007

Methods for atomic layer deposition of hafnium-containing high-K dielectric materials

Nyi O. Myo; Kenric Cho; Shreyas Kher; Pravin K. Narwankar; Steve Poppe; Craig Metzner; Paul Deaten

Archive | 2006

System and method for depositing a gaseous mixture onto a substrate surface using a showerhead apparatus

David Bour; Lori D. Washington; Sandeep Nijhawan; Ronald Stevens; Jacob Smith; Alexander Tam; Nyi O. Myo; Steve Park; Rosemary Twist; Garry Kwong; Jie Su

Archive | 2010

Non-contact substrate processing

Blake Koelmel; Nyi O. Myo

Archive | 2011

Methods and apparatus for deposition processes

Nyi O. Myo; Kevin Joseph Bautista; Zhiyuan Ye; Schubert S. Chu; Yihwan Kim

Archive | 2009

Cvd reactor with multiple processing levels and dual-axis motorized lift mechanism

Richard O. Collins; Nyi O. Myo; Kevin Joseph Bautista; John S. Webb; Errol C. Sanchez; Yi-Chiau Huang; Kailash Kiran Patalay; Zhi Yuan Zhou; Wilson Yu

Archive | 2012