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Dive into the research topics where Pravin K. Narwankar is active.

Publication


Featured researches published by Pravin K. Narwankar.


Archive | 2005

Apparatuses and methods for atomic layer deposition of hafnium-containing high-k dielectric materials

Shreyas Kher; Pravin K. Narwankar; Rahul Sharangapani


Archive | 1997

Sequencing of the recipe steps for the optimal low-k HDP-CVD processing

Maciek Orczyk; Laxman Murugesh; Pravin K. Narwankar


Archive | 1998

Deposition reactor having vaporizing, mixing and cleaning capabilities

Craig Metzner; Gregory F. Redinbo; Pravin K. Narwankar; Patricia M. Liu


Archive | 1999

Sequencing of the recipe steps for the optimal low-dielectric constant HDP-CVD Processing

Maciek Orczyk; Laxman Murugesh; Pravin K. Narwankar


Archive | 2004

Formation of a silicon oxynitride layer on a high-K dielectric material

Pravin K. Narwankar; Gregg Higashi


Archive | 2005

Plasma treatment of hafnium-containing materials

Shankar Muthukrishnan; Rahul Sharangpani; Pravin K. Narwankar; Shreyas Kher; Khaled Ahmed; Yi Ma


Archive | 1997

High deposition rate recipe for low dielectric constant films

Pravin K. Narwankar; Laxman Murugesh; Maciek Orczyk; Jianmin Qiao


Archive | 2004

Stabilization of high-k dielectric materials

Christopher S. Olsen; Pravin K. Narwankar; Shreyas Kher; Randhir Thakur; Shankar Muthukrishnan; Philip A. Kraus


Archive | 1998

Post deposition treatment of dielectric films for interface control

Pravin K. Narwankar; Gregory F. Redinbo; Patricia M. Liu; Huyen T. Tran


Archive | 2000

Method of forming metal electrodes

Pravin K. Narwankar; Annabel Nickles; Xiaoliang Jin; Deepak Upadhyaya; Yaxin Wang

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