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Kevin Mukai

Applied Materials

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Publication

Featured researches published by Kevin Mukai.

Archive | 2003

Gap-fill techniques

Kevin Mukai; Kimberly Branshaw; Zheng Yuan; Xinyun Xia; Xiaolin Chen; Dongqing Li; M. Karim; Van Ton; Cary Ching; Steve Ghanayeim; Nitin K. Ingle

Archive | 2001

Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption

Kevin Mukai; Shankar Chandran

Archive | 2004

Limited thermal budget formation of PMD layers

Zheng Yuan; Shankar Venkataraman; Cary Ching; Shang Wong; Kevin Mukai; Nitin K. Ingle

Archive | 2002

Aggregate dielectric layer to reduce nitride consumption

Kevin Mukai; Shankar Chandran

Archive | 2001

Process operation supplementation with oxygen

Kevin Mukai; Shankar Chandran

Archive | 2003

Ramp temperature techniques for improved mean wafer before clean

Won B. Bang; Yen-Kun Victor Wang; Kevin Mukai; Theresa Marie O. Liu

Archive | 2005

Limited thermal budget formation of pre-metal dielectric layers

Zheng Yuan; Shankar Venkataraman; Cary Ching; Shan Wong; Kevin Mukai; Nitin K. Ingle

Archive | 2002

Method and apparatus for bpsg deposition

Kevin Mukai; Shankar Chandran

Archive | 2001

Method of forming a silicon oxide layer on a substrate

Kevin Mukai; Srinivas D. Nemani

Archive | 2004

Improved gap-fill techniques

Kimberly Branshaw; Xiaolin Chen; Cary Ching; Steve Ghanayeim; Nitin K. Ingle; M. Ziaul Karim; Dongqing Li; Kevin Mukai; Van Ton; Xinyun Xia; Zheng Yuan

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Collaboration

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Shankar Chandran

Applied Materials

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Cary Ching

Applied Materials

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Nitin K. Ingle

Applied Materials

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Srinivas D. Nemani

Applied Materials

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Dongqing Li

Applied Materials

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Kimberly Branshaw

Applied Materials

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Steve Ghanayeim

Applied Materials

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Van Ton

Applied Materials

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Xiaolin Chen

Applied Materials

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Xinyun Xia

Applied Materials

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