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Shankar Chandran

Applied Materials

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Publication

Featured researches published by Shankar Chandran.

Archive | 2002

Accelerated plasma clean

Shankar Chandran; Scott A. Hendrickson; Gwendolyn D. Jones; Shankar Venkataraman; Ellie Yieh

Archive | 1998

Two-step borophosphosilicate glass deposition process and related devices and apparatus

Li-Qun Xia; Ellie Yieh; Maria Galiano; Francimar Campana; Shankar Chandran

Archive | 2003

Method and apparatus for processing semiconductor substrates with hydroxyl radicals

Himanshu Pokharna; Shankar Chandran; Srinivas D. Nemani; Chen-An Chen; Francimar Campana; Ellie Yieh; Li-Qun Xia

Archive | 1998

Cleaning process end point determination using throttle valve position

Hiroyuki Ueda; Hirotaka Tanabe; Makoto Okubo; Shankar Chandran; Ellie Yieh

Archive | 2001

Method and apparatus for controlling dopant concentration during BPSG film deposition to reduce nitride consumption

Kevin Mukai; Shankar Chandran

Archive | 2000

Accelerated plasma cleaning

Shankar Chandran; Scott A. Hendrickson; Gwendolyn D. Jones; Shankar Venkataraman; Ellie Yieh

Archive | 2002

Aggregate dielectric layer to reduce nitride consumption

Kevin Mukai; Shankar Chandran

Archive | 2001

Process operation supplementation with oxygen

Kevin Mukai; Shankar Chandran

Archive | 2002

Method and apparatus for bpsg deposition

Kevin Mukai; Shankar Chandran

Archive | 2002

Procede et appareil de depot de borophosphosilicate

Kevin Mukai; Shankar Chandran

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Collaboration

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Ellie Yieh

Applied Materials

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Kevin Mukai

Applied Materials

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Francimar Campana

Applied Materials

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Gwendolyn D. Jones

Applied Materials

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Hirotaka Tanabe

Applied Materials

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Hiroyuki Ueda

Applied Materials

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Li-Qun Xia

Applied Materials

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Makoto Okubo

Applied Materials

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Scott A. Hendrickson

Applied Materials

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Shankar Venkataraman

Applied Materials

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