Is this you? Create Your Porfile
Avatar

Kinya Ueno

Tokyo Electron

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Kinya Ueno is active.

Explore More

Publication

Featured researches published by Kinya Ueno.

Archive | 1999

Spin cleaning method

Kinya Ueno

Archive | 1997

Apparatus and method for drying substrates

Yuji Kamikawa; Kinya Ueno

Archive | 1997

Apparatus for and method of cleaning objects to be processed

Yuji Kamikawa; Satoshi Nakashima; Kinya Ueno

Archive | 1998

Apparatus for and method of cleaning object to be processed

Yuji Kamikawa; Kinya Ueno; Satoshi Nakashima

Archive | 1996

Substrate washing method, substrate washing-drying method, substrate washing apparatus and substrate washing-drying apparatus

Yuuji Kamikawa; Kinya Ueno; Naoki Shindo; Yoshio Kumagai

Archive | 1993

Method for washing wafers

Kinya Ueno; Hiroki Taniyama

Archive | 1999

Method of cleaning objects to be processed

Yuji Kamikawa; Kinya Ueno; Satoshi Nakashima

Archive | 2007

Substrate processing apparatus for resist film removal

Takayuki Toshima; Kinya Ueno; Miyako Yamasaka; Hideyuki Tsutsumi; Tadashi Iino; Yuji Kamikawa

Archive | 2000

Substrate cleaning tool, having permeable cleaning head

Keizo Hirose; Kenji Sekiguchi; Tomohide Inoue; Takanori Miyazaki; Kinya Ueno

Archive | 2000

Instrument, device and method for washing substrate

Keizo Hirose; Tomotsugu Inoue; Takanori Miyazaki; Takehiko Orii; Kenji Sekiguchi; Kinya Ueno; 欽也 上野; 朋嗣 井上; 高典 宮崎; 圭蔵 廣瀬; 武彦 折居; 賢治 関口

Explore More

Collaboration

Dive into the Kinya Ueno's collaboration.

Top Co-Authors
Avatar

Yuji Kamikawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Satoshi Nakashima

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Naoki Shindo

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Yoshio Kumagai

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Yuuji Kamikawa

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Hideyuki Tsutsumi

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Miyako Yamasaka

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Tadashi Iino

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Takayuki Toshima

Tokyo Electron

View shared research outputs
Top Co-Authors
Avatar

Keizo Hirose

Tokyo Electron

View shared research outputs
Explore More
Researchain Logo
Decentralizing Knowledge