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Dive into the research topics where Miyako Yamasaka is active.

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Featured researches published by Miyako Yamasaka.


Archive | 1997

Method for washing and drying substrates

Miyako Yamasaka


Archive | 1999

Liquid treatment method and apparatus

Naoki Shindo; Miyako Yamasaka; Yuji Kamikawa


Archive | 1997

Method for wet etching of thin film

Hiroki Taniyama; Miyako Yamasaka; Hiroyuki Kudou; Akira Yonemizu


Archive | 2000

Cleaning method and cleaning equipment

Yuji Kamikawa; Naoki Shindo; Shigenori Kitahara; Miyako Yamasaka


Archive | 1997

Method for processing through wafer rotation and its device

Hiroyuki Kudo; Hiromi Taniyama; Miyako Yamasaka; Akira Yonemizu; 都 山坂; 裕幸 工藤; 昭 米水; 博己 谷山


Archive | 2001

Method and apparatus of processing surface of substrate

Takayuki Toshima; Miyako Yamasaka


Archive | 2007

Substrate processing apparatus for resist film removal

Takayuki Toshima; Kinya Ueno; Miyako Yamasaka; Hideyuki Tsutsumi; Tadashi Iino; Yuji Kamikawa


china semiconductor technology international conference | 2012

Single Wafer Wet Clean Challenges and Solution for 32nm

Takayuki Toshima; Shouuichi Nishikido; Miyako Yamasaka; Kang Suni


Archive | 2000

Method for processing substrate, e.g. semiconductor wafer comprises arranging substrate in processing vessel, forming layer of solvent over surface of substrate, and dissolving an operating gas in layer of solvent

Takayuki Toshima; Kinya Ueno; Miyako Yamasaka; Hideyuki Tsutsumi; Tadashi Iino; Yuji Kamikawa


Archive | 2001

Substrate treatment method and substrate treater

Tadashi Iino; Yuji Kamikawa; Takayuki Toshima; Hideyuki Tsutsumi; Kinya Ueno; Miyako Yamasaka

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