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Kohl Alexander

Carl Zeiss AG

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Publication

Featured researches published by Kohl Alexander.

Archive | 2003

Abbildungseinrichtung in einer Projektionsbelichtungsanlage

Hummel Wolfgang; Fischer Juergen; Aubele Karl-Eugen; Merz Erich; Raoul Reiner; Rief Klaus; Schoengart Stefan; Neumaier Markus; Trossbach Baerbel; Rassel Thorsten; Weber Ulrich; Muehlbeyer Michael; Holderer Hubert; Kohl Alexander; Weber Jochen; Lippert Johannes

Archive | 2004

Polarisationsoptimiertes Axiconsystem und Beleuchtungssystem mit einem solchen Axiconsystem

Fuerter Gerhard; Singer Wolfgang; Maul Manfred; Kohl Alexander; Fiolka Damian

Archive | 2007

Illumination system for microlithography projection exposure system, has lens group with zoom systems connected one after other such that entrance light distribution in entrance surface is transferred into withdrawal light distribution

Kohl Alexander

Archive | 2003

Verfahren zur Korrektur von schwingungsinduzierten Abbildungsfehlern in einem Objektiv

Kohl Alexander; Holderer Hubert

Archive | 2004

Vorrichtung zur Aufnahme eines Strahlteilerelements

Weber Ulrich; Kohl Alexander; Holderer Hubert; Schoeppach Armin; Gaber Erwin; Kaiser Winfried; Garreis Reiner; Gruner Toralf

Archive | 2004

Objective, in particular projection objective for microlithography used in the manufacture of semiconductor components has one housing for optical elements provided with mating surfaces

Weber Ulrich; Kohl Alexander; Holderer Hubert

Archive | 2003

Projection objective system for microlithography uses set of lenses and mirrors and beam divider with tilting control and aspherical top, front and rear surfaces

Weber Ulrich; Holderer Hubert; Kohl Alexander

Archive | 2001

Verfahren zur Optimierung der Abbildungseigenschaften von mindestens zwei optischen Elementen sowie photolithographisches Fertigungsverfahren

Mecking Birgit; Gruner Toralf; Kohl Alexander

Archive | 2004

Objective, in particular projection objective for microlithography

Weber Ulrich; Holderer Hubert; Kohl Alexander

Archive | 2003

TILTING DEVICE FOR SUPPORT FOR OPTICAL MEMBER

Holderer Hubert; Weber Ulrich; Kohl Alexander

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Holderer Hubert

Carl Zeiss AG

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Weber Ulrich

Carl Zeiss AG

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Gruner Toralf

Carl Zeiss AG

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Schoeppach Armin

Carl Zeiss AG

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Aubele Karl-Eugen

Carl Zeiss AG

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Brandenburg Hartmut

Carl Zeiss AG

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Fiolka Damian

Carl Zeiss AG

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Fischer Juergen

Carl Zeiss AG

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Fuerter Gerhard

Carl Zeiss AG

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Gaber Erwin

Carl Zeiss AG

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