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Konstantin Makhratchev

Applied Materials

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Publication

Featured researches published by Konstantin Makhratchev.

Archive | 2013

ELECTROSTATIC CHUCK WITH ADVANCED RF AND TEMPERATURE UNIFORMITY

Dmitry Lubomirsky; Jennifer Y. Sun; Mark Markovsky; Konstantin Makhratchev; Douglas A. Buchberger; Samer Banna

Archive | 2013

HIGH TEMPERATURE ELECTROSTATIC CHUCK WITH REAL-TIME HEAT ZONE REGULATING CAPABILITY

Dmitry Lubomirsky; Jennifer Y. Sun; Senh Thach; Xing Lin; Michael D. Willwerth; Konstantin Makhratchev

Archive | 2013

Electrostatic chuck with internal flow adjustments for improved temperature distribution

Vijay D. Parkhe; Matthew James Busche; Wendell Boyd; Senh Thach; Konstantin Makhratchev; Masanori Ono

Archive | 2012

Single-body electrostatic chuck

Senh Thach; Dmitry Lubomirsky; Jennifer Y. Sun; Konstantin Makhratchev

Archive | 2015

PIXILATED TEMPERATURE CONTROLLED SUBSTRATE SUPPORT ASSEMBLY

Vijay D. Parkhe; Konstantin Makhratchev; Masanori Ono; Zhiqiang Guo

Archive | 2014

Pixelated cooling, temperature controlled substrate support assembly

Vijay D. Parkhe; Wendell Boyde; Matthew James Busche; Konstantin Makhratchev; Masanori Ono; Senh Thach

Archive | 2014

Electrostatic chuck having thermally isolated zones with minimal crosstalk

Vijay D. Parkhe; Konstantin Makhratchev; Jason Della Rosa; Hamid Noorbakhsh; Brad L. Mays; Douglas A. Buchberger

Archive | 2013

Electrostatic chuck having reduced power loss

Konstantin Makhratchev; Jennifer Y. Sun

Archive | 2016

Tunable temperature controlled substrate support assembly

Vijay D. Parkhe; Steven E. Babayan; Konstantin Makhratchev; Zhiqiang Guo; Phillip R. Sommer; Dan Marohl

Archive | 2014

CONTROL SYSTEMS EMPLOYING DEFLECTION SENSORS TO CONTROL CLAMPING FORCES APPLIED BY ELECTROSTATIC CHUCKS, AND RELATED METHODS

Wendell Boyd; Vijay D. Parkhe; Matthew James Busche; Konstantin Makhratchev; Masanori Ono; Senh Thach

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Vijay D. Parkhe

Applied Materials

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Senh Thach

Applied Materials

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Masanori Ono

Applied Materials

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Jennifer Y. Sun

Applied Materials

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Matthew James Busche

Applied Materials

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Dmitry Lubomirsky

Applied Materials

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Douglas A. Buchberger

Applied Materials

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Wendell Boyd

Applied Materials

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Wendell Boyde

Applied Materials

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Zhiqiang Guo

Applied Materials

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