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Senh Thach

Applied Materials

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Publication

Featured researches published by Senh Thach.

Archive | 2003

System level in-situ integrated dielectric etch process particularly useful for copper dual damascene

Chang-Lin Hsieh; Diana Xiaobing Ma; Brian Sy-Yuan Shieh; Gerald Zheyao Yin; Jennifer Y. Sun; Senh Thach; Lee Luo; Claes Bjorkman

Archive | 2002

Yttrium oxide based surface coating for semiconductor IC processing vacuum chambers

Jennifer Y. Sun; Shun Jackson Wu; Senh Thach; Ananda H. Kumar; Robert W. Wu; Hong Wang; Yixing Lin; Clifford C. Stow

Archive | 2004

Clean, dense yttrium oxide coating protecting semiconductor processing apparatus

Jennifer Y. Sun; Senh Thach; Jim Dempster; Li Xu

Archive | 2001

Electrochemically roughened aluminum semiconductor processing apparatus surfaces

Jennifer Y. Sun; Clifford C. Stow; Senh Thach

Archive | 2004

Gas distribution plate fabricated from a solid yttrium oxide-comprising substrate

Jennifer Y. Sun; Senh Thach; James Dempster; Li Xu; Thanh Pham

Archive | 2004

Plasma reactor with overhead RF source power electrode with low loss, low arcing tendency and low contamination

Daniel J. Hofman; Jennifer Y. Sun; Senh Thach; Yan Ye

Archive | 2008

Method of coating semiconductor processing apparatus with protective yttrium-containing coatings

Jennifer Y. Sun; Shun Jackson Wu; Senh Thach; Ananda H. Kumar; Robert W. Wu; Hong Wang; Yixing Lin; Clifford C. Stow; Jim Dempster; Li Xu; Kenneth S. Collins; Ren-Guan Duan; Thomas Graves; Xiaoming He; Jie Yuan

Archive | 2009

Ceramic coating comprising yttrium which is resistant to a reducing plasma

Jennifer Y. Sun; Xiaoming He; Kenneth S. Collins; Thomas Graves; Senh Thach; Jie Yuan; Li Xu; Ren-Guan Duan

Archive | 2008

Plasma resistant coatings for plasma chamber components

Jennifer Y. Sun; Xiaoming He; Senh Thach

Archive | 2007

Plasma-resistant ceramics with controlled electrical resistivity

Jennifer Y. Sun; Kenneth S. Collins; Ren-Guan Duan; Senh Thach; Thomas Graves; Xiaoming He; Jie Yuan

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Jennifer Y. Sun

Applied Materials

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Li Xu

Applied Materials

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Ren-Guan Duan

Applied Materials

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Thomas Graves

Applied Materials

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Kenneth S. Collins

Applied Materials

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Clifford C. Stow

Applied Materials

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Xiaoming He

Applied Materials

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Jie Yuan

Applied Materials

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Konstantin Makhratchev

Applied Materials

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Shun Jackson Wu

Applied Materials

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