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Dive into the research topics where Andrew J. Nagengast is active.

Publication


Featured researches published by Andrew J. Nagengast.


Archive | 2010

Carrier head with retaining ring and carrier ring

Steven M. Zuniga; Andrew J. Nagengast; Jeonghoon Oh


Archive | 2007

Flexible Membrane for Carrier Head

Steven M. Zuniga; Andrew J. Nagengast; Jeonghoon Oh


Archive | 2007

Retaining ring, flexible membrane for applying load to a retaining ring, and retaining ring assembly

Steven M. Zuniga; Andrew J. Nagengast; Jeonghoon Oh


Archive | 2007

Fast substrate loading on polishing head without membrane inflation step

Jeonghoon Oh; Andrew J. Nagengast; Steven M. Zuniga; Hung Chih Chen


Archive | 2010

Carrier Ring for Carrier Head

Steven M. Zuniga; Andrew J. Nagengast; Jeonghoon Oh


Archive | 2009

Bonding apparatus and method

Steven M. Zuniga; Robert D. Tolles; Derek G. Aqui; Andrew J. Nagengast; Anthony J. Senn; Keenan Leon Guerrero


Archive | 2002

Carrier head with a vibration reduction feature for a chemical mechanical polishing system

Sandy S. Chao; Andrew J. Nagengast


Archive | 2000

Platen for retaining polishing material

Shijian Li; Manoocher Birang; Ramin Emami; Andrew J. Nagengast; Douglas Orcutt Brown; Shi-Ping Wang; Martin Scales; John M. White


Archive | 2008

Apparatus and methods for retaining a plurality of elongated photovoltaic modules

Andrew J. Nagengast; Thomas Brezoczky


Archive | 2013

MULTI-CHAMBER CARRIER HEAD WITH A TEXTURED MEMBRANE

Jeonghoon Oh; Tsz-Sin Siu; Hung Chih Chen; Andrew J. Nagengast; Steven M. Zuniga; Thomas Brezoczky

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