Kuei-Sung Chang
TSMC
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Publication
Featured researches published by Kuei-Sung Chang.
international conference on solid-state sensors, actuators and microsystems | 2011
Cm Liu; Bruce C. S. Chou; Robert Chin-Fu Tsai; Nick Y.M. Shen; Benior Sf Chen; Emerson Cheng; Hsiao Chin Tuan; Alex Kalnitsky; Sean Cheng; Chung-Hsien Lin; Tien-Kan Chung; Kuei-Sung Chang; Yi-Shao Liu
MEMS technology development and MEMS manufacturing activities at TSMC are presented. Two models for process development, i.e. customer product/process “phase-in” and internally developed “platform” are discussed. The latter is a TSMC-MEMS platform for motion sensors and other devices.
Archive | 2011
Chia-Hua Chu; Kuei-Sung Chang; Chung-Hsien Lin
Archive | 2013
Yu-Chia Liu; Chia-Hua Chu; Jung-Huei Peng; Kuei-Sung Chang; Chun-Wen Cheng
Archive | 2011
Chia-Hua Chu; Yi Heng Tsai; Kai-Chih Liang; Chia-Pao Shu; Li-Cheng Chu; Kuei-Sung Chang; Hsueh-An Yang; Chung-Hsien Lin
Archive | 2011
Chia-Ming Hung; Hung-Sen Wang; Hsiang-Fu Chen; Te-Hsi Lee; Alex Kalnitsky; Wen-Chuan Tai; Kuei-Sung Chang; Yi Heng Tsai
Archive | 2014
Chia-Pao Shu; Chun-Wen Cheng; Kuei-Sung Chang; Hsin-Ting Huang; Shang-Ying Tsai; Jung-Huei Peng
Archive | 2011
Yi Heng Tsai; Chia-Hua Chu; Kuei-Sung Chang
Archive | 2013
Yu-Chia Liu; Chia-Hua Chu; Kuei-Sung Chang; Chun-Wen Cheng
Archive | 2013
Kuei-Sung Chang; Chia-Hua Chu; Yu-Chia Liu
Archive | 2013
Kuei-Sung Chang; Chun-Wen Cheng; Alexander Kalnitsky; Chia-Hua Chu
