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Kunkel Gerhard

Infineon Technologies

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Publication

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Archive | 2008

Verfahren zur Bestimmung der Güte eines Pellicles

Henke Wolfgang; Kunkel Gerhard

Archive | 2003

Verfahren zur Herstellung einer auf ein Belichtungsgerät angepassten Maske

Hassmann Jens; Voigt Ina; Kowalewski Johannes; Kunkel Gerhard; Schedel Thorsten; Schroeder Uwe Paul

Archive | 2007

Verfahren zur Herstellung einer Phasenschiebermaske und Verfahren zur Belichtung eines Halbleiterwafers mit solch einer Phasenschiebermaske

Hennig Mario; Koehle Roderick; Kunkel Gerhard; Pforr Rainer; Voigt Ina

Archive | 2006

Verfahren zur Anpassung von Strukturabmessungen bei der photolithographischen Projektion eines Musters von Strukturelementen auf einen Halbleiterwafer

Kunkel Gerhard

Archive | 2005

Light projection system for use during manufacture of semiconductor elements on substrate has lamp shining light through slit onto mask or reticle scanned in front of lens

Kunkel Gerhard

Archive | 2005

Integrated circuit e.g. NROM, path pattern lithographic projection method, involves operating projection apparatus in two modes to project pattern onto resist layer, and controlling phase of exposure light by alternating phase shift mask

Jahnke Andreas; Henke Wolfgang; Kunkel Gerhard; Teipel Ansgar; Iacono Stephanie

Archive | 2004

Method of manufacturing a phase shifting mask and wafer exposure method using such a phase shifting mask

Hennig Mario; Koehle Roderick; Kunkel Gerhard; Pforr Rainer; Voigt Ina

Archive | 2004

Verfahren zur Herstellung einer Phasenmaske

Kunkel Gerhard; Henke Wolfgang

Archive | 2004

Projector lens transmission measurement procedure uses scattering grid to create two order beam pattern on lens and records intensity profile in image plane

Henke Wolfgang; Kunkel Gerhard

Archive | 2004

Verfahren zur Charakterisierung einer Beleuchtungsquelle in einem Belichtungsgerät

Henke Wolfgang; Kunkel Gerhard

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Henke Wolfgang

Infineon Technologies

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Voigt Ina

Infineon Technologies

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Hennig Mario

Infineon Technologies

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Koehle Roderick

Infineon Technologies

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Pforr Rainer

Infineon Technologies

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Schedel Thorsten

Infineon Technologies

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Genz Oliver

Infineon Technologies

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Hassmann Jens

Infineon Technologies

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Iacono Stephanie

Infineon Technologies

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Jahnke Andreas

Infineon Technologies

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