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Koehle Roderick

Infineon Technologies

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Publication

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Archive | 2013

LITHOGRAPHIC MASK AND METHOD OF MANUFACTURING LITHOGRAPHIC MASK

Rolff Haiko; Byloos Carla; Noelscher Christoph; Morgana Nicolo; Koehle Roderick; Moukara Molela; Neubauer Ralf; Pforr Rainer; Savignac Dominique

Archive | 2010

LITHOGRAPHY MASK, AND MANUFACTURING METHOD OF LITHOGRAPHY MASK

Rolff Haiko; Byloos Carla; Noelscher Christoph; Morgana Nicolo; Koehle Roderick; Moukara Molela; Neubauer Ralf; Pforr Rainer; Savignac Dominique

Archive | 2007

Lithografiemaske zur Abbildung von konvexen Strukturen

Moukara Molela; Ludwig Burkhard; Thiele Joerg; Ahrens Marco; Koehle Roderick; Pforr Rainer; Morgana Nicolo

Archive | 2007

Verfahren zur Herstellung einer Phasenschiebermaske und Verfahren zur Belichtung eines Halbleiterwafers mit solch einer Phasenschiebermaske

Hennig Mario; Koehle Roderick; Kunkel Gerhard; Pforr Rainer; Voigt Ina

Archive | 2006

Tri-tone mask for lithographic manufacturing of semiconductor device, has mask structure in chromium layer, halftone layer or glass layer, where structure is surrounded by strip of halftone layer with predetermined width

Moukara Molela; Winkler Thorsten; Zeiler Karsten; Koehle Roderick; Thiele Joerg; Dettmann Wolfgang; Mittermeier Armelle Benedicte; Hennig Mario; Koestler Wolfram

Archive | 2006

Verfahren zum Bestimmen einer Matrix von Transmissionskreuzkoeffizienten bei einer optischen Näherungskorrektur von Maskenlayouts

Koehle Roderick

Archive | 2006

Lithographiemaske und Verfahren zum Erzeugen einer Lithographiemaske

Noelscher Christoph; Henkel Thomas; Renner Kerstin; Koehle Roderick

Archive | 2005

Verfahren zur Überprüfung von periodischen Strukturen auf Lithographiemasken

Koehle Roderick; Verbeek Martin

Archive | 2004

Werkwijze voor inspecteren van periodieke roosterstructuren op lithografiemaskers.

Dettmann Wolfgang; Koehle Roderick; Verbeek Martin

Archive | 2004

Method of manufacturing a phase shifting mask and wafer exposure method using such a phase shifting mask

Hennig Mario; Koehle Roderick; Kunkel Gerhard; Pforr Rainer; Voigt Ina

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Pforr Rainer

Infineon Technologies

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Hennig Mario

Infineon Technologies

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Kunkel Gerhard

Infineon Technologies

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Moukara Molela

Infineon Technologies

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Voigt Ina

Infineon Technologies

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Dettmann Wolfgang

Infineon Technologies

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Noelscher Christoph

Infineon Technologies

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Verbeek Martin

Infineon Technologies

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Thiele Joerg

Infineon Technologies

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Henkel Thomas

Infineon Technologies

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