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Haiguang Chen

KLA-Tencor

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Publication

Featured researches published by Haiguang Chen.

Archive | 2012

SYSTEMS AND METHODS FOR WAFER SURFACE FEATURE DETECTION, CLASSIFICATION AND QUANTIFICATION WITH WAFER GEOMETRY METROLOGY TOOLS

Haiguang Chen; Jaydeep K. Sinha; Sergey Kamensky

Archive | 2004

Methods and systems for detection of selected defects particularly in relatively noisy inspection data

Sean Wu; Haiguang Chen; Michael D. Kirk

Archive | 2013

Systems and methods of advanced site-based nanotopography for wafer surface metrology

Haiguang Chen; Sergey Kamensky; Jaydeep K. Sinha; Pradeep Vukkadala

Archive | 2012

Methods and systems for improved localized feature quantification in surface metrology tools

Haiguang Chen; Jaydeep K. Sinha; Shouhong Tang; John Hager; Andrew Zeng; Sergey Kamensky

Archive | 2013

System and Method to Emulate Finite Element Model Based Prediction of In-Plane Distortions Due to Semiconductor Wafer Chucking

Pradeep Vukkadala; Sathish Veeraraghavan; Jaydeep K. Sinha; Haiguang Chen; Michael D. Kirk

Archive | 2014

Process-Induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors

Pradeep Vukkadala; Haiguang Chen; Jaydeep K. Sinha; Sathish Veeraraghavan

Archive | 2012

Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool

Haiguang Chen; Jaydeep K. Sinha; Sergey Kamensky; Sathish Veeraraghavan; Pradeep Vukkadala

Archive | 2012

Methods and systems of object based metrology for advanced wafer surface nanotopography

Haiguang Chen; Jaydeep K. Sinha; Sergey Kamensky

Archive | 2015

Hybrid Phase Unwrapping Systems and Methods for Patterned Wafer Measurement

Haiguang Chen; Jaydeep K. Sinha

Archive | 2012

Detection of selected defects in relatively noisy inspection data

Haiguang Chen; Michael D. Kirk; Stephen Biellak; Jaydeep K. Sinha

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Collaboration

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Jaydeep K. Sinha

KLA-Tencor

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Sergey Kamensky

KLA-Tencor

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Pradeep Vukkadala

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Sathish Veeraraghavan

KLA-Tencor

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Michael D. Kirk

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Shouhong Tang

KLA-Tencor

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Andrew Zeng

KLA-Tencor

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John Hager

KLA-Tencor

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Sean Wu

KLA-Tencor

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Stephen Biellak

KLA-Tencor

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