Haiguang Chen

SYSTEMS AND METHODS FOR WAFER SURFACE FEATURE DETECTION, CLASSIFICATION AND QUANTIFICATION WITH WAFER GEOMETRY METROLOGY TOOLS

Methods and systems for detection of selected defects particularly in relatively noisy inspection data

Systems and methods of advanced site-based nanotopography for wafer surface metrology

Methods and systems for improved localized feature quantification in surface metrology tools

System and Method to Emulate Finite Element Model Based Prediction of In-Plane Distortions Due to Semiconductor Wafer Chucking

Process-Induced Distortion Prediction and Feedforward and Feedback Correction of Overlay Errors

Systems, methods and metrics for wafer high order shape characterization and wafer classification using wafer dimensional geometry tool

Methods and systems of object based metrology for advanced wafer surface nanotopography

Hybrid Phase Unwrapping Systems and Methods for Patterned Wafer Measurement

Detection of selected defects in relatively noisy inspection data