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Kwang-Myung Lee

Samsung

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Publication

Featured researches published by Kwang-Myung Lee.

Archive | 2002

Method for processing a wafer and apparatus for performing the same

Kwang-Myung Lee; Mikio Takagi; Jae-Hyuk An; Seung-ki Chae; Jea-Wook Kim

Archive | 2005

Etching apparatus and etching method

Kwang-Myung Lee; Ki-Young Yun; Il-kyoung Kim; Sung-wook Park; Seung-ki Chae; No-Hyun Huh; Jae-Wook Kim; Jae-Hyuck An; Woo-Seok Kim; Myeong-Jin Kim; Kyoung-Ho Jang; Shinji Yanagisawa; Kengo Tsutsumi; Seiichi Takahashi

Experimental Mechanics | 2017

Estimation of Fracture Toughness of Metallic Materials Using Instrumented Indentation: Critical Indentation Stress and Strain Model

Seung-Won Jeon; Kwang-Myung Lee; Jungsub Kim; Wonchan Kim; Chan-Pyoung Park; Dongil Kwon

Archive | 2008

ROTATION BODY CLEANING UNIT AND VACUUM PUMP HAVING THE SAME

Tea-Jin Park; Seung-ki Chae; Kwang-Myung Lee; Sang-Gon Lee

Archive | 2007

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT

Il-kyoung Kim; Kwang-Myung Lee; No-Hyun Huh; Wan-Goo Hwang; Ki-Young Yun

Archive | 2007

Temperature control system for semiconductor manufacturing equipment

Bong-Hyun Cho; Chang-Woo Eun; Hyun-Seok Choi; Sang-Gon Lee; Kwang-Myung Lee; In-Joo Lee; Yong-ho Choi; Seong-Kuk An; Choul-Oh Park

Archive | 2008

Vacuum pump having rotation body cleaning unit with spraying holes on an output surface of the cleaning body surrounding a shaft

Tea-Jin Park; Seung-ki Chae; Kwang-Myung Lee; Sang-Gon Lee

Archive | 2004

Antenna for use in producing plasma and plasma processing apparatus comprising the same

Woo-seok Kim; Seung-ki Chae; Do-young Kam; Kwang-Myung Lee; Jaihyung Won; Jai-Kwang Shin; Jae-joon Oh; Sang-Jean Jeon

Archive | 2002

Verfahren zum Ätzen einer auf einem Wafer ausgebildeten vorbestimmten Schicht und Vorrichtung zur Durchführung derselben A method of etching a predetermined layer formed on a wafer and apparatus for performing the same

Jae-Hyuk An; Seung-ki Chae; Jae-Wook Kim; Kwang-Myung Lee; Mikio Takagi

Archive | 2002

Verfahren zum Verarbeiten eines Wafers und Vorrichtung zur Durchführung desselben A method for processing a wafer and apparatus for performing the same

Kwang-Myung Lee; Mikio Takagi; Jae-Hyuk An; Seung-ki Chae; Jae-Wook Kim

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Collaboration

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Seung-ki Chae

Samsung

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Jae-Wook Kim

Chung-Ang University

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Sang-Gon Lee

Samsung

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Il-kyoung Kim

Samsung

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Ki-Young Yun

Samsung

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No-Hyun Huh

Samsung

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Tea-Jin Park

Samsung

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Bong-Hyun Cho

Samsung

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Chan-Pyoung Park

Seoul National University

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Chang-Woo Eun

Samsung

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