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No-Hyun Huh

Samsung

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Publication

Featured researches published by No-Hyun Huh.

Archive | 2005

Etching apparatus and etching method

Kwang-Myung Lee; Ki-Young Yun; Il-kyoung Kim; Sung-wook Park; Seung-ki Chae; No-Hyun Huh; Jae-Wook Kim; Jae-Hyuck An; Woo-Seok Kim; Myeong-Jin Kim; Kyoung-Ho Jang; Shinji Yanagisawa; Kengo Tsutsumi; Seiichi Takahashi

Archive | 2007

Ion implanter with etch prevention member(s)

Il-kyoung Kim; No-Hyun Huh; Tae-Won Lee; Sung-wook Park; Ki-Young Yun; Won-Soon Lee; Young-Ha Yoon; Tae-Sub Im

Archive | 2007

SUBSTRATE TREATMENT APPARATUS AND CLEANING METHOD

Hyung-sik Hong; Ki-Sun Kim; No-Hyun Huh; Jong-Myeong Lee

Archive | 2010

Gas supply device and apparatus for processing a substrate

Woo-Seok Kim; Jae-Hyun Han; Joo-Pyo Hong; No-Hyun Huh

Archive | 2007

Method of ashing an object and apparatus for performing the same

Jae-Kyung Park; Won-Soon Lee; Young-kyou Park; No-Hyun Huh; Yong-Ho Park

Archive | 2006

Method of cleaning plasma applicator in situ and plasma applicator employing the same

Wan-Goo Hwang; No-Hyun Huh; Il-kyoung Kim; Jeong-soo Suh; Ki-Young Yun

Archive | 2006

Plasma doping method and plasma doping apparatus for performing the same

Gyeong-Su Keum; Ji-hyun Hur; Jaihyung Won; No-Hyun Huh; Jae-joon Oh

Archive | 2007

SEMICONDUCTOR DEVICE MANUFACTURING APPARATUS INCLUDING TEMPERATURE MEASURING UNIT

Il-kyoung Kim; Kwang-Myung Lee; No-Hyun Huh; Wan-Goo Hwang; Ki-Young Yun

Archive | 2007

METHODS AND APPARATUS FOR EVAPORATING LIQUID PRECURSORS AND METHODS OF FORMING A DIELECTRIC LAYER USING THE SAME

Jeong-soo Suh; No-Hyun Huh; Myeong-Jin Kim; Wan-Goo Hwang; Hyun Wook Lee

Archive | 2002

Induction magnet for use in producing high-density plasma and method of manufacturing the same, and semiconductor manufacturing equipment comprising the induction magnet

Jung-Hyun Hwang; No-Hyun Huh; Byeung-wook Choi; Jin-Su Jung; Jae-Sun Choi; Doo-Won Lee

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Collaboration

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Byeung-wook Choi

Samsung

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Doo-Won Lee

Samsung

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Jung-Hyun Hwang

Samsung

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Il-kyoung Kim

Samsung

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Ki-Young Yun

Samsung

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Chang-Won Choi

Samsung

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Jae-Sun Choi

Samsung

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Jin-Su Jung

Samsung

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Wan-Goo Hwang

Samsung

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Jeong-soo Suh

Samsung

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