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Offenberg Michael

Bosch

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Archive | 2001

SENSOR WITH AT LEAST ONE MICROMECHANCAL STRUCTURE AND METHOD FOR THE PRODUCTION THEREOF

Reichenbach Frank; Pinter Stefan; Henning Frank; Artmann Hans; Baumann Helmut; Laermer Franz; Offenberg Michael; Bischopink Georg

Archive | 1996

CAPTEUR D'ACCELERATION ET PROCEDE DE FABRICATION D'UN TEL CAPTEUR

Muenzel Horst; Schubert Dietrich; Bohringer Alexandra; Offenberg Michael; Heyers Klaus; Lutz Markus

Archive | 2004

Verfahren zur Herstellung eines mikromechanischen Sensors

Muchow Joerg; Muenzel Horst; Offenberg Michael; Waldvogel Winfried

Archive | 2001

Procedure for production of micro-mechanical structures such as rotation sensors has extra protective layer deposition and etching steps to protect the structure during processing of the reverse side of the substrate

Offenberg Michael; Bischof Udo

Archive | 1999

Micromechanical component manufacturing method, e.g. for micromechanical acceleration sensor manufacture

Skapa Helmut; Muenzel Horst; Laermer Franz; Offenberg Michael; Vossenberg Heinz-Georg

Archive | 2007

Herstellungsverfahren für mikromechanisches Bauelement

Offenberg Michael; Bischof Udo; Lutz Markus

Archive | 2007

Beschleunigungssensor und Verfahren zur Herstellung eines Beschleunigungssensors

Muenzel Horst; Schubert Dietrich; Boehringer Alexandra; Offenberg Michael; Heyers Klaus; Lutz Markus

Archive | 2015

Micromechanical sensor element

Offenberg Michael; Baus Michael

Archive | 2011

ELEMENTO SENSORE MICROMECCANICO, PROCEDIMENTO ATTO ALLA FABBRICAZIONE DI UN ELEMENTO SENSORE MICROMECCANICO E PROCEDIMENTO PER FAR FUNZIONARE UN ELEMENTO SENSORE MICROMECCANICO

Baus Michael; Offenberg Michael

Archive | 2010

Mikromechanisches Sensorelement, Verfahren zur Herstellung eines mikromechanischen Sensorelements und Verfahren zum Betrieb eines mikromechanischen Sensorelements

Offenberg Michael; Baus Michael

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Muenzel Horst

Bosch

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Laermer Franz

Bosch

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Bischof Udo

Bosch

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Baus Michael

Bosch

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Lutz Markus

Bosch

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Artmann Hans

Bosch

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Baumann Helmut

Bosch

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Pinter Stefan

Bosch

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Schilp Andrea

Bosch

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Frank Henning

Bosch

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