Laeticia Petit

Fabrication and testing of planar chalcogenide waveguide integrated microfluidic sensor

We have fabricated and tested, to the best of our knowledge, the first microfluidic device monolithically integrated with planar chalcogenide glass waveguides on a silicon substrate. High-quality Ge(23)Sb(7)S(70) glass films have been deposited onto oxide coated silicon wafers using thermal evaporation, and high-index-contrast channel waveguides have been defined using SF(6) plasma etching. Microfluidic channel patterning in photocurable resin (SU8) and channel sealing by a polydimethylsiloxane (PDMS) cover completed the device fabrication. The chalcogenide waveguides yield a transmission loss of 2.3 dB/cm at 1550 nm. We show in this letter that using this device, N-methylaniline can be detected using its well-defined absorption fingerprint of the N-H bond near 1496 nm. Our measurements indicate linear response of the sensor to varying N-methylaniline concentrations. From our experiments, a sensitivity of this sensor down to a N-methylaniline concentration 0.7 vol. % is expected. Given the low-cost fabrication process used, and robust device configuration, our integration scheme provides a promising device platform for chemical sensing applications.

Planar waveguide-coupled, high-index-contrast, high-Q resonators in chalcogenide glass for sensing

High-index-contrast compact microdisk resonators in thermally evaporated As2S3 and Ge17Sb12S71 chalcogenide glass films are designed and fabricated using standard UV lithography and characterized. Our pulley coupler configuration demonstrates coupling of the resonators to monolithically integrated photonic wire waveguides without resorting to demanding fine-line lithography. Microdisk resonators in As2S3 support whispering-gallery-mode with cavity quality factors (Q) exceeding 2 x 10(5), the highest Q value reported in resonator structures in chalcogenide glasses to the best of our knowledge. We have successfully demonstrated a lab-on-a-chip prototype sensor device with the integration of our resonator with planar microfluidic systems. The sensor shows a refractive index sensitivity of 182 nm/RIU (refractive index unit) and a wavelength resolution of 0.1 pm through a resonant peak fit. This corresponds to a refractive index detection limit of 8 x 10(-7) RIU at 1550 nm in wavelength, which could be further improved by shifting the operating wavelength to a region where water absorption is reduced.

Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

We demonstrate, for the first time to the best of our knowledge, low-loss, Si-CMOS-compatible fabrication of single-mode chalcogenide strip waveguides. As a novel route of chalcogenide glass film patterning, lift-off allows several benefits: leverage with Si-CMOS process compatibility; ability to fabricate single-mode waveguides with core sizes down to submicron range; and reduced sidewall roughness. High-index-contrast Ge(23)Sb(7)S(70) strip waveguides have been fabricated using lift-off with excellent uniformity of loss propagation and the lowest loss figure of reported to date. We also show that small core Ge(23)Sb(7)S(70) rib waveguides can be fabricated via lift-off as well, with loss figures lower than 0.5 dB/cm. Additionally, we find through waveguide modal analysis that although overall transmission loss is low, the predominant source of this loss comes from scattering at the sidewalls.

Demonstration of chalcogenide glass racetrack microresonators

We have demonstrated what we believe to be the first chalcogenide glass racetrack microresonator using a complementary metal-oxide semiconductor-compatible lift-off technique with thermally evaporated As(2)S(3) films. The device simultaneously features a small footprint of 0.012 mm x 0.012 mm, a cavity Q (quality factor) of 10,000, and an extinction ratio of 32 dB. These resonators exhibit a very high sensitivity to refractive index changes with a demonstrated detection capability of Dn(As(2)S(3)=(4.5 x 10(-6)+/-10%) refractive index unit. The resonators were applied to derive a photorefractive response of As(2)S(3) to lambda=550 nm light. The resonator devices are a versatile platform for both sensing and glass material property investigation.

Optical loss reduction in high-index-contrast chalcogenide glass waveguides via thermal reflow

A thermal reflow technique is applied to high-index-contrast, sub-micron waveguides in As(2)S(3) chalcogenide glass to reduce the sidewall roughness and associated optical scattering loss. We show that the reflow process effectively decreases sidewall roughness of chalcogenide glass waveguides. A kinetic model is presented to quantitatively explain the sidewall roughness evolution during thermal reflow. Further, we develop a technique to calculate waveguide optical loss using the roughness evolution model, and predict the ultimate low loss limit in reflowed high-index-contrast glass waveguides. Up to 50% optical loss reduction after reflow treatment is experimentally observed, and the practical loss limiting factors are discussed.

Nonlinear optical properties of glasses in the system Ge/Ga-Sb-S/Se.

We report n2 measurements of selected chalcogenide glasses using a modified Z-scan technique. Measurements were made with picosecond pulses emitted by a 10 Hz Q-switched, mode-locked Nd:YAG laser at 1064 nm under conditions suitable to characterize ultrafast nonlinearities. The nonlinear index increases significantly up to 246 times the n2 for fused silica with an increase of SbS3 units and also very slightly with the replacement of Ge by Ga or S by Se. We have attributed the variation of n2 to the total number of electronic lone pairs and to the position of the absorption band gap, which are induced by the presence of GaS4 units or Se-Se bonds in the glass structure.

PROGRESS ON THE FABRICATION OF ON-CHIP, INTEGRATED CHALCOGENIDE GLASS (CHG)-BASED SENSORS

In this paper, we review ongoing progress in the development of novel on-chip, low loss planar molecular sensors that address the emerging need in the field of biochemical sensing. Chalcogenide glasses were identified as the material of choice for sensing due to their wide infrared transparency window. We report the details of manufacturing processes used to realize novel high-index-contrast, compact micro-disk resonators. Our findings demonstrate that our device can operate in dual modalities, for detection of the infrared optical absorption of a binding event using cavity enhanced spectroscopy, or sensing refractive index change due to surface molecular binding and extracting micro-structural evolution information via cavity enhanced refractometry.

Final Shape of Precision Molded Optics: Part I—Computational Approach, Material Definitions and the Effect of Lens Shape

Coupled thermomechanical finite element models were developed in ABAQUS to simulate the precision glass lens molding process, including the stages of heating, soaking, pressing, cooling and release. The aim of the models was the prediction of the deviation of the final lens profile from that of the mold, which was accomplished to within one-half of a micron. The molding glass was modeled as viscoelastic in shear and volume using an n-term, prony series; temperature dependence of the material behavior was taken into account using the assumption of thermal rheological simplicity (TRS); structural relaxation as described by the Tool-Narayanaswamy-Moynihan (TNM)-model was used to account for temperature history dependent expansion and contraction, and the molds were modeled as elastic taking into account both mechanical and thermal strain. In Part I of this two-part series, the computational approach and material definitions are presented. Furthermore, in preparation for the sensitivity analysis presented in Part II, this study includes both a bi-convex lens and a steep meniscus lens, which reveals a fundamental difference in how the deviation evolves for these different lens geometries. This study, therefore, motivates the inclusion of both lens types in the validations and sensitivity analysis of Part II. It is shown that the deviation of the steep meniscus lens is more sensitive to the mechanical behavior of the glass, due to the strain response of the newly formed lens that occurs when the pressing force is removed.

Low-loss high-index-contrast planar waveguides with graded-index cladding layers.

We experimentally demonstrate, for the first time, propagation loss reduction via graded-index (GRIN) cladding layers in high-index-contrast (HIC) glass waveguides. We show that scattering loss arising from sidewall roughness can be significantly reduced without compromising the high-index-contrast condition, by inserting thin GRIN cladding layers with refractive indices intermediate between the core and topmost cover of a strip waveguide. Loss as low as 1.5 dB/cm is achieved in small core (1.6 mum x 0.35 mum), high-index-contrast (Deltan = 1.37) arsenic-based sulfide strip waveguides. This GRIN cladding design is generally applicable to HIC waveguide systems such as Si/SiO2.

Estimation of peak Raman gain coefficients for Barium-Bismuth-Tellurite glasses from spontaneous Raman cross-section experiments.

In this paper we explore the TeO(2)-Bi(2)O(3)-BaO glass family with varied TeO(2) concentration for Raman gain applications, and we report, for the first time, the peak Raman gain coefficients of glasses within this glass family extrapolated from non-resonant absolute Raman cross-section measurements at 785 nm. Estimated Raman gain coefficients show peak values of up to 40 times higher than silica for the main TeO(2) bands. Other optical properties, including index dispersion from the visible to the long wave Infrared (LWIR) are also summarized in this paper.