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Lars Metzger

Bosch

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Publication

Featured researches published by Lars Metzger.

Archive | 2004

Micromechanical structural element having a diaphragm and method for producing such a structural element

Matthias Fuertsch; Stefan Pinter; Heribert Weber; Frank Fischer; Lars Metzger; Christoph Schelling; Frieder Sundermeier

Sensors and Actuators A-physical | 2004

Stable thin film encapsulation of acceleration sensors using polycrystalline silicon as sacrificial and encapsulation layer

A Hochst; R Scheuerer; H Stahl; Frank Fischer; Lars Metzger; R Reichenbach; Franz Lärmer; Silvia Kronmüller; S Watcham; Cristina Rusu; Ann Witvrouw; R Gunn

Archive | 2001

Micromechanical component including function components suspended movably above a substrate

Frank Fischer; Lars Metzger

Archive | 2005

Micromechanical Capacitive Sensor Element

Hubert Benzel; Stefan Finkbeiner; Frank Fischer; Helmut Baumann; Lars Metzger; Roland Scheuerer; Peter Brauchle; Andreas Feustel; Matthias Neubauer

Archive | 2002

Micromechanical mass flow sensor and method for the production thereof

Matthias Fuertsch; Frank Fischer; Lars Metzger; Frieder Sundermeier

Archive | 2003

Method for the production of a micromechanical device, particularly a micromechanical oscillating mirror device

Lars Metzger; Frank Fischer

Archive | 2005

Mikromechanisches Bauelement mit einer Membran und Verfahren zur Herstellung eines solchen Bauelements

Matthias Fuertsch; Stefan Pinter; Heribert Weber; Frank Fischer; Lars Metzger; Christoph Schelling; Frieder Sundermeier

Archive | 2005

Micromechanical component having a diaphragm, and method for manufacturing such a component

Frank Fischer; Hans Artmann; Lars Metzger; Arnim Hoechst; Julian Gonska

Archive | 2013

MICROMECHANICAL COMPONENT HAVING A DIAPHRAGM

Frank Fischer; Hans Artmann; Lars Metzger; Arnim Hoechst; Julian Gonska

Sensors and Actuators A-physical | 2007

Polysilicon sacrificial layer etching using ClF3 for thin film encapsulation of silicon acceleration sensors with high aspect ratio

Lars Metzger; Frank Fischer; Wilfried Mokwa

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Collaboration

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Frank Fischer

Bosch

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Arnim Hoechst

Bosch

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Frieder Sundermeier

Bosch

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Helmut Baumann

Bosch

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Matthias Fuertsch

Bosch

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Roland Scheuerer

Bosch

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Wilhelm Frey

Bosch

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Hans-Peter Baer

Bosch

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Hans-Peter Trah

Bosch

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Thorsten Pannek

Bosch

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