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Laurence D Schultz

Micron Technology

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Publication

Featured researches published by Laurence D Schultz.

Archive | 1992

Method and apparatus for mechanical planarization and endpoint detection of a semiconductor wafer

Laurence D Schultz

Archive | 1990

Method of endpoint detection during chemical/mechanical planarization of semiconductor wafers

Gurtej S. Sandhu; Laurence D Schultz; Trung T. Doan

Archive | 1991

Apparatus for endpoint detection during mechanical planarization of semiconductor wafers

Gurtej S. Sandhu; Laurence D Schultz; Trung T. Doan

Archive | 1995

Method for chemical planarization (CMP) of a semiconductor wafer to provide a planar surface free of microscratches

Trung T. Doan; Malcolm Grief; Laurence D Schultz

Archive | 1992

Method for planarizing semiconductor wafers with a non-circular polishing pad

Laurence D Schultz; Mark E. Tuttle; Trung T. Doan

Archive | 1996

Under-pad for chemical-mechanical planarization of semiconductor wafers

Scott G. Meikle; Laurence D Schultz

Archive | 1993

Apparatus for planarizing semiconductor wafers, and a polishing pad for a planarization apparatus

Laurence D Schultz; Mark E. Tuttle; Trung T. Doan

Archive | 1993

Chemical-mechanical planarising - by turning semiconductor wafer, planarising, and polishing wafer

Trung T. Doan; Malcolm Grief; Laurence D Schultz

Archive | 1993

Device and method for planarizing semiconductor wafer and polishing pad

Trung T. Doan; Laurence D Schultz; Mark E. Tuttle; トゥルン・ティー・ドーン; マーク・イー・タトル; ロウレンス・ディー・シュルツ

Archive | 1993

Verfahren zur chemisch-mechanischen Planierung (CMP) eines Halbleiter-Wafers

Trung T. Doan; Malcolm Grief; Laurence D Schultz

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Trung T. Doan

Micron Technology

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Mark E. Tuttle

Micron Technology

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Malcolm Grief

Philips

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Gurtej S. Sandhu

Micron Technology

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Malcolm Grief

Philips

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Scott G. Meikle

Micron Technology

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