Lauri Sainiemi

Reversible switching between superhydrophobic states on a hierarchically structured surface

Nature offers exciting examples for functional wetting properties based on superhydrophobicity, such as the self-cleaning surfaces on plant leaves and trapped air on immersed insect surfaces allowing underwater breathing. They inspire biomimetic approaches in science and technology. Superhydrophobicity relies on the Cassie wetting state where air is trapped within the surface topography. Pressure can trigger an irreversible transition from the Cassie state to the Wenzel state with no trapped air—this transition is usually detrimental for nonwetting functionality and is to be avoided. Here we present a new type of reversible, localized and instantaneous transition between two Cassie wetting states, enabled by two-level (dual-scale) topography of a superhydrophobic surface, that allows writing, erasing, rewriting and storing of optically displayed information in plastrons related to different length scales.

Superhydrophobic Tracks for Low-Friction, Guided Transport of Water Droplets

anti-fogging, [ 6 ] anti-icing, [ 7 ] buoyancy [ 8 ] and drag reduction. [ 9 ] By defi nition, a surface is superhydrophobic if the contact angle between a water drop and the surface at the solid/liquid/air interface is larger than 150 ° , and the contact angle hysteresis is small, i.e., drops readily slide or roll off when the surface is tilted slightly. [ 10–12 ] Here we explore the feasibility of using superhydrophobicity for guided transport of water droplets. We demonstrate a simple yet effi cient approach for droplet transport, in which the droplet is moving on a superhydrophobic surface, using gravity or electrostatic forces as the driving force for droplet transportation and using tracks with vertical walls as gravitational potential barriers to design trajectories. Although the slope of the platform is as small as a few degrees, the drops move at a considerable speed up to 14 cm s − 1 , even in highly curved trajectories. We further demonstrate splitting of a droplet using a superhydrophobic knife and drop-size selection using superhydrophobic tracks. These concepts may fi nd applications in droplet microfl uidics and lab-on-a-chip systems where single droplets with potential analytes are manipulated. [ 13–16 ]

Non-Reflecting Silicon and Polymer Surfaces by Plasma Etching and Replication

Constantly increasing demand of renewable and nonpolluting energy production methods has made solar cells one of today’s hottest research areas. Developing more cost-effective fabrication methods that enable production of extremely non-refl ecting surfaces is one of the key issues in solar cell research. [ 1 , 2 ] Many other applications, such as miniaturized chemical analysis systems, would also benefi t greatly from low-cost surfaces with low and uniform refl ectivity. [ 3 ] Typically, suppression of Fresnel refl ection has been achieved by antirefl ective coatings, but they suppress refl ection effi ciently only in a narrow wavelength range. Suppression of refl ection over a broad spectral range can be achieved by using nanotextured surfaces that form a graded transition of the refractive index from air to the substrate. [ 1 , 2 , 4–12 ]

Rapid fabrication of high aspect ratio silicon nanopillars for chemical analysis

In this study, a method for fabrication of high aspect ratio silicon nanopillars is presented. The method combines liquid flame spray production of silica nanoparticle agglomerates with cryogenic deep reactive ion etching. First, the nanoparticle agglomerates, having a diameter of about 100 nm, are deposited on a silicon wafer. Then, during the subsequent cryogenic deep reactive ion etching process, the particle agglomerates act as etch masks and silicon nanopillars are formed. Aspect ratios of up to 20:1 are demonstrated. The masking process is rapid, cheap and has the potential to be scaled up for large areas. Three other structured silicon surfaces were fabricated for comparison. All four surfaces were utilized as desorption/ionization on silicon (DIOS) sample plates. The mass spectrometry results indicate that nanopillar surfaces masked with the liquid flame spray technique are well suited as DIOS sample plates.

Effective Passivation of Black Silicon Surfaces by Atomic Layer Deposition

The poor charge-carrier transport properties attributed to nanostructured surfaces have been so far more detrimental for final device operation than the gain obtained from the reduced reflectance. Here, we demonstrate results that simultaneously show a huge improvement in the light absorption and in the surface passivation by applying atomic layer coating on highly absorbing silicon nanostructures. The results advance the development of photovoltaic applications, including high-efficiency solar cells or any devices, that require high-sensitivity light response.

Mask material effects in cryogenic deep reactive ion etching

Cryogenic silicon etching in inductively coupled SF6∕O2 plasma has been studied, especially the behavior of mask materials. Suitability of eight different mask materials for cryogenic silicon deep reactive ion etching has been investigated. Three of the five photoresists suffered from cracking during cryogenic etching. We clarified the stages of the etching process and identified two mechanisms behind the cracking: thermal expansion mismatch and mechanical deformation from wafer clamping and backside helium pressure. Also thickness of the photoresist plays a role in cracking, but, contrary to common conception that all thick resists suffer from cracking in cryogenic etching, we found that SU-8 negative resist did not crack, even for very thick layers. This is explained to be due to its high cross-linking density. All three hard mask materials had high selectivities and were free of cracking problems. However, aluminum mask resulted in poor surface quality, while thermally grown SiO2 and amorphous Al2O3 de...

Surface assisted laser desorption/ionization on two-layered amorphous silicon coated hybrid nanostructures

Matrix-free laser desorption/ionization was studied on two-layered sample plates consisting of a substrate and a thin film coating. The effect of the substrate material was studied by depositing thin films of amorphous silicon on top of silicon, silica, polymeric photoresist SU-8, and an inorganic-organic hybrid. Des-arg9-bradykinin signal intensity was used to evaluate the sample plates. Silica and hybrid substrates were found to give superior signals compared with silicon and SU-8 because of thermal insulation and compatibility with amorphous silicon deposition process. The effect of surface topography was studied by growing amorphous silicon on hybrid micro- and nanostructures, as well as planar hybrid. Compared with planar sample plates, micro- and nanostructures gave weaker and stronger signals, respectively. Different coating materials were tested by growing different thin film coatings on the same substrate. Good signals were obtained from titania and amorphous silicon coated sample plates, but not from alumina coated, silicon nitride coated, or uncoated sample plates. Overall, the strongest signals were obtained from oxygen plasma treated and amorphous silicon coated inorganic-organic hybrid, which was tested for peptide-, protein-, and drug molecule analysis. Peptides and drugs were analyzed with little interference at low masses, subfemtomole detection levels were achieved for des-arg9-bradykinin, and the sample plates were also suitable for ionization of small proteins.

Dry fabrication of microdevices by the combination of focused ion beam and cryogenic deep reactive ion etching

In this paper, we demonstrate silicon microdevice fabrication by a combination of focused ion beam (FIB) and cryogenic deep reactive ion etching (DRIE). Applying FIB treatment only to a thin surface layer enables very high writing speed compared with FIB milling. The use of DRIE then defines the micro- and nanodevices utilizing the FIB-modified silicon as a mask. We demonstrate the ability to create patterns on highly 3D structures, which is extremely challenging by other nanofabrication methods. The alignment of optically made and FIB-defined patterns is also demonstrated. We also show that complete microelectromechanical systems (MEMS) can be fabricated by this method by presenting a double-ended tuning fork resonator as an example. Extremely short process time is achieved as the full fabrication cycle from mask design to electrical measurements can be completed during one working day.

Stroboscopic supercontinuum white-light interferometer for MEMS characterization

We used a supercontinuum-based scanning white-light interferometer to characterize the oscillation of a MEMS device. The output of a commercially available supercontinuum light source (FiberWare Ilum II USB) was modulated to achieve stroboscopic operation. By synchronizing the modulation frequency of the source to the sample oscillation, dynamic 3-D profile measurements were recorded. These results were validated against those obtained with a white light LED setup. The measured maximum deflection of a 400×25×4 μm(3) microbridge driven with 0-6.8 V sinusoidal voltage at 10 Hz was 1.42±0.03 μm (supercontinuum), which agreed with the LED measurement. The method shows promise for characterization of high-frequency MEMS devices.

Integration of Fully Microfabricated, Three-Dimensionally Sharp Electrospray Ionization Tips with Microfluidic Glass Chips

This paper presents parallel microfabrication of three-dimensionally sharp electrospray ionization emitters made out of glass. For the first time, the fabrication of glass emitters relies only on standard microfabrication techniques (i.e., deposition, photolithography, and wet etching), and all manual machining steps are omitted. We also demonstrate a straightforward integration of the three-dimensionally sharp emitter tip with a microfluidic separation channel, which has been one of the major challenges of micro total chemical analysis systems for the past 15 years. As a result, our microfabrication approach provides glass ESI emitters that allow robust performance from run to run and tip to tip and do not suffer from sample spreading at the microchannel outlet. The repeatability of the signal intensity for parallel tips was shown to be within 8.0% RSD (n = 6), and the migration time repeatability for repeated injections was within 6.2% RSD (n = 6). At best, separation plates of up to 2.7 × 10(5)/m were obtained. Since the microfabrication process readily yields three-dimensionally sharp emitter tips, very low ESI voltages (typically 1.4-1.75 kV) suffice for stable ESI, which eventually allows for the use of a variety of different solvent compositions from purely aqueous to high organic content. Here, the advantage of using aqueous conditions is demonstrated in protein analysis.