Lawrence C. Lei | Researchain

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Featured researches published by Lawrence C. Lei.

Archive | 2000

One-piece dual gas faceplate for a showerhead in a semiconductor wafer processing system

Salvador P. Umotoy; Lawrence C. Lei; Anh N. Nguyen; Steve H. Chiao

Archive | 1999

Method and apparatus for preventing edge deposition

Joseph Yudovsky; Thomas A. Madar; Salvador P. Umotoy; Son Trinh; Lawrence C. Lei; Anzhong Andrew Chang; Xiaoxiong John Yuan

Archive | 2007

Self aligning non contact shadow ring process kit

Joseph Yudovsky; Lawrence C. Lei; Salvador P. Umotoy; Thomas A. Madar; Girish Dixit; Gwo-Chuan Tzu

Archive | 2000

Apparatus for aligning a wafer

Ling Chen; Joseph Yudovsky; Ying Yu; Lawrence C. Lei

Archive | 2000

Fastening device for a purge ring

Joseph Yudovsky; Salvador P. Umotoy; Lawrence C. Lei; Ronald L. Rose

Archive | 1997

Method for aligning a wafer

Ling Chen; Joseph Yudovsky; Ying Yu; Lawrence C. Lei

Archive | 2000

Tungsten chamber with stationary heater

Joseph Yudovsky; Lawrence C. Lei; Salvador P. Umotoy

Archive | 2000

Self-aligning noncontact shadow ring processing kit

Girish Dixit; Lawrence C. Lei; Thomas A. Madar; Gwo-Chuan Tzu; Salvador P. Umotoy; Joseph Yudovsky; ディグジットギリッシュ; チュアンツーグォウ; ウモトイサルバドール; ユドブスキジョセフ; エーマダートーマス; シーレイローレンス

Archive | 2000

Apparatus And Method For Aligning A Wafer

Ling Chen; Joseph Yudovsky; Ying Yu; Lawrence C. Lei

Archive | 2000

Method and apparatus for preventing deposition on edge

Anzhong Andrew Chang; Yudovsky Joseph; Lawrence C. Lei; Thomas A. Madar; Umotoi Salvador; Son Trinh; Xiaoxiong John Yuan; アンドリューチャンアンツォン; ウモトイサルヴァドール; ジョンユーアンシャオション; ユドフスキージョセフ; ンゴクトリンソン; エイマーダートーマス; シーレイローレンス

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