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Dive into the research topics where Son Trinh is active.

Publication


Featured researches published by Son Trinh.


Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan


Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 1999

Method and apparatus for preventing edge deposition

Joseph Yudovsky; Thomas A. Madar; Salvador P. Umotoy; Son Trinh; Lawrence C. Lei; Anzhong Andrew Chang; Xiaoxiong John Yuan


Archive | 2000

Resonant chamber applicator for remote plasma source

Be Van Vo; Salvador P. Umotoy; Son Trinh; Lawrence Chung-Lai Lei; Sergio Edelstein; Avi Tepman; Chien-Teh Kao; Kenneth Tsai


Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan


Archive | 2000

Showerhead with reduced contact area

Karl A. Littau; Bevan Vo; Salvador P. Umotoy; Son Trinh; Chien-Teh Kao; Ken Kaung Lai; Bo Zheng; Ping Jian; Siqing Lu; Anzhong Chang


Archive | 1997

Heat exchange passage connection

Lawrence Lei; Son Trinh; Mark Johnson


Archive | 1997

Pivoting lid assembly for a chamber

Lawrence Lei; Son Trinh; Gwo-Chuan Tzu; Mark Johnson

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