Son Trinh | Researchain

Archive Network Publication Hotspot Collaboration

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Son Trinh is active.

Explore More

Publication

Featured researches published by Son Trinh.

Archive | 2005

In-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wie W. Wang; See-Eng Phan

Archive | 2008

Method for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Lid assembly for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2005

Substrate support for in-situ dry clean chamber for front end of line fabrication

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 1999

Method and apparatus for preventing edge deposition

Joseph Yudovsky; Thomas A. Madar; Salvador P. Umotoy; Son Trinh; Lawrence C. Lei; Anzhong Andrew Chang; Xiaoxiong John Yuan

Archive | 2000

Resonant chamber applicator for remote plasma source

Be Van Vo; Salvador P. Umotoy; Son Trinh; Lawrence Chung-Lai Lei; Sergio Edelstein; Avi Tepman; Chien-Teh Kao; Kenneth Tsai

Archive | 2008

METHOD FOR REMOVING OXIDES

Chien-Teh Kao; Jing-Pei Chou; Chiukin Lai; Sal Umotoy; Joel M. Huston; Son Trinh; Mei Chang; Xiaoxiong Yuan; Yu Chang; Xinliang Lu; Wei W. Wang; See-Eng Phan

Archive | 2000